DAEIL SYSTEMS

DAEIL SYSTEMS

Vibration Solution
for PHOTOMAS QUALIFICATION
DVIA-P

Active Pneumatic Vibration Isolation System
for Semiconductor Metrology

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  • Overview
 

The DVIA-P series is an active pneumatic vibration isolation system,
specifically designed to control vibrations for advanced semiconductor metrology equipment
that are integrated with ultra-precision motorized linear stages.
And the semicondcutor metrology equipment requires vibration isolation
in the low frequency as well as the ultra-fast settling time.
The DVIA-P series incorporate extremely sensitive sensors and powerful pneumatic servo actuators,
generating enormous force to counteract incoming vibrations from building floors and deliver
the ultra-fast settling time for nano-resolution imaging without any disturbances.

 

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