Vibration Isolation Case Studies

YIMOTECH ZEISS Sigma 360 FE-SEM DVIA-ML1000 installation report — the DVIA-ML1000 active vibration isolation platform was installed at Guangzhou for end user Resonac Electronic Materials, then re-tuned (2nd trial) and measured with the equipment Turned off. Against the Sigma 360 horizontal and vertical allowable vibration specification (mm/s² RMS, 1–100 Hz), the bare floor exceeded the limit on the vertical and front-to-back axes, while the DVIA-ML1000 platform passed on all three axes. The tuning request work order, the allowable vibration tables and the per-axis Autospectrum plots are published; no installation photographs were permitted at the site.

YIMO TECH Hitachi High-Tech SU7000 SEM DVIA-ML1000 installation report — the DVIA-ML1000 active vibration isolation platform was installed at Fuzhou for end user Fujian University of Technology, then tuned and measured with the equipment in the IDLE state. Against the SU7000 horizontal and vertical allowable vibration specification (µm pk-pk, 1–10 Hz), the floor and the DVIA-ML1000 platform both passed on the vertical, left-to-right, and front-to-back axes. The tuning request work order, the allowable vibration tables, the per-axis Autospectrum plots and the installation photo are published.

Installation report for the DVIA-ULFB700 vibration isolation platform (S/N 260707R4) supporting an Attocube AttoDRY 2100 cryostat in Room L02, Building 2 of the Electronics and Telecommunications Research Institute (ETRI). Tuning and vibration measurement were performed with the equipment in the IDLE state against a 3.125 µm/s RMS (VC-E) requirement in both the horizontal and vertical directions. On the floor all three axes failed the requirement, while on the isolated DVIA-ULFB700 platform all three axes passed: after the first round of tuning the vertical axis reached VC-F and the horizontal axes reached VC-E. Per-axis VC Curves for the Z, X and Y axes are published.

DVIA-ULF700 installation report (serial 260511R3) for a ZEISS Sigma 360 FE-SEM at End User Jiechuang Trading in Shanghai, China. Tuning was carried out on 2026.08.20 and vibration was measured with the equipment in the Idle state at two points, the installation floor and the top surface of the DVIA-ULF700. The floor failed the vertical criterion while both horizontal axes passed; on the DVIA-ULF700 all three axes (Vertical, Left to Right, Front to Back) satisfied the ZEISS specification, confirming that the isolator fully attenuates the vertical exceedance present in the site. Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and two installation photos.

Installation report for the DVIA-P4000 vibration isolation system, serial 260401R3-1, installed beneath an Advantest E5620 on the 3rd floor of the FAB at a Tier-1 Semiconductor site in Texas, USA. Work completed August 14, 2026. Scope covered rigging and positioning, lifting, setting the platform flush with the raised floor, levelling to within 0.5 mm, and attaching seismic restraints between the floor and the isolator, followed by vibration verification. The equipment manufacturer specifies VC-C (< 12.5 µm/s, 1-80 Hz) in all directions. Measurements were taken in three directions with calibrated seismic accelerometers at a 160 Hz bandwidth, and the DVIA-P4000 PASSED VC-C on Front-Back, Left-Right and Vertical. The allowable vibration specification and all three VC Curves are published.

Installation report for the DVIF-FB-1000x2000x3000H vibration isolation platform (S/N 241001R5) in the 3rd floor cleanroom of the FST Osan plant, covering the performance verification measurement carried out after reinforcement work on the platform top plate. A LAZIN LODAS-B18 photomask blank inspection system is mounted on top. Measurement was performed with the equipment in the IDLE state against a 25 µm/s RMS (VC-B) requirement in both the horizontal and vertical directions. Before reinforcement all three axes exceeded the requirement; afterwards the vertical (Z) axis improved from 27.7 to 17.9 µm/s and the left to right (X) axis from 70.7 to 22.4 µm/s, both satisfying VC-B, while the front to back (Y) axis improved from 71.0 to 48.0 µm/s (32.4% reduction) but remained at the VC-A level. Per-axis before/after VC Curves for the DVIF-FB top plate and per-axis VC Curves measured on the upper equipment stage are published.