Installation Report

DVIA-ULF Series

08-21-2026

ETRI Attocube AttoDRY 2100 Cryostat DVIA-ULFB700 Installation Report

DVIA-ULF Series

Installation Report

ETRI

Electronics and Telecommunications Research Institute

Attocube

AttoDRY 2100

Cryostat

DVIA-ULFB700

260707R4

Overview

Tuning and vibration measurement were performed after installing the DVIA-ULFB700 in Room L02, Building 2 of the Electronics and Telecommunications Research Institute.

Inspection and vibration measurement were performed in the IDLE state.

The data is presented in VC Curve format, together with reference material on the corresponding vibration levels.

Vibration Isolation System Information

Model: DVIA-ULFB700

Serial Number: 260707R4

Engineer

Gyumin Park · DAEIL SYSTEMS

Tuning Date

2026.08.21

Installation Site

Room L02, Building 2, Electronics and Telecommunications Research Institute

End User

Electronics and Telecommunications Research Institute

Equipment

Manufacturer: Attocube

Equipment: Cryostat

Model: AttoDRY 2100

Vibration Specification

Horizontal

Frequency [Hz]	Specification [µm/s RMS]
1	3.125
100	3.125

Vertical

Frequency [Hz]	Specification [µm/s RMS]
1	3.125
100	3.125

Equipment Condition

IDLE

Measurement Equipment

10.1) Measurement Equipment

Hardware: B&K Front End Type 3040-A-040

Software: B&K Pulse Labshop22 Version

10.2) Accelerometer

PCB 393B05

Measurement Setup

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Conclusion

This measurement was performed with the cryostat (AttoDRY2100) mounted on top of the vibration isolation platform (DVIA-ULFB700).

The initial floor vibration exceeded VC-E, the vibration criterion of the equipment mounted on top; after the isolator was installed and a first round of tuning was carried out, the vertical axis reached VC-F and the horizontal axes reached VC-E, securing stable performance.

Measurement Summary

Measurement Point	Vibration Specification	Axis	Floor	DVIA-ULFB700
1. Floor 2. DVIA-ULFB700	See Section 8	Vertical (Z-axis)	✗ FAIL	✓ PASS
		Left to Right (X-axis)	✗ FAIL	✓ PASS
		Front to Back (Y-axis)	✗ FAIL	✓ PASS

Data and Image

Z-axis VC Curves

X-axis VC Curves

Y-axis VC Curves

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude¹ μm/s (μin/s)	Detail Size² μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	< 0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency range 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to the line width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is also applicable to imaging associated with probe technologies, AFM and nanotechnology.

3. The information provided in this table is for reference only. In most instances it is advisable to seek the advice of a specialist who is familiar with the application and the vibration requirements of the equipment and the process.