Installation Report

DVIA-ULF Series

07-06-2026

Coxem Schottky Field Emission SEM DVIA-ULFB700 Installation Report

DVIA-ULF Series

Installation Report

Coxem

Schottky Field Emission SEM

FX-2000

FE-SEM

DVIA-ULFB700

260423R1-2

Overview

Tuning and vibration measurement were performed after installing the DVIA-ULFB700 on the 5th floor of the Coxem Technology Research Institute.

Inspection and vibration measurement were performed with the equipment installed and in the Turned on/IDLE state.

The data is presented in VC Curve format, together with reference material on the corresponding vibration levels.

Vibration Isolation System Information

Model: DVIA-ULFB700

Serial Number: 260423R1-2

Engineer

Dongkyu Park, Gyumin Park · DAEIL SYSTEMS

Tuning Date

July 6, 2026

Installation Site

5th floor, Coxem Technology Research Institute

End User

Coxem

Equipment

Manufacturer: Coxem

Equipment: Schottky Field Emission SEM

Model: FX-2000

Vibration Specification

VC-E

Equipment Condition

Equipment installed and Turned on/IDLE

Measurement Equipment

10.1) Measurement Equipment

Hardware: B&K Front End Type 3040-A-040

Software: B&K Pulse Labshop22 Version

10.2) Accelerometer

PCB 393B05

Measurement Setup

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Conclusion

Inspection confirmed that all X, Y, and Z axes properly met the required specification.

Although somewhat strong vibration and noise occur due to the operation of the fan of the equipment on top of the isolation platform, the required specification is fully satisfied even under this environment, so it is determined that there will be no issue with future use of the equipment.

Measurement Summary

Measurement Point	Vibration Specification	Axis	Floor	DVIA-ULFB700
1. Floor 2. DVIA-ULFB700	See Section 8	Vertical (Z-axis)	✗ FAIL	✓ PASS
		Left to Right (X-axis)	✗ FAIL	✓ PASS
		Front to Back (Y-axis)	✗ FAIL	✓ PASS

Data and Image

Z-axis Autospectrum

Z-axis VC Curves

X-axis Autospectrum

X-axis VC Curves

Y-axis Autospectrum

Y-axis VC Curves

Installation Photo

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude (μm/s) (μin/s)	Detail Size (μm)
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	< 0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc.