Standard Pneumatic Vibration Mount
DVIM-Series provides much more damping than ISO pneumatic vibration isolators and it is a subsystem used in linear XY stages to minimize vibrations and stabilize the stages after the stage motions occur. DVIM-M offers fast payload setting time, high vibration isolation performance level and damping at affordable price.
Excellent Vibration Isolation
DVIM-M provides the high level of vibration isolation in both vertical and horizontal axis. DVIM-M pneumatic isolators are optimized to offer the maximum vibration isolation performance within the heavy and high-speed linear XY stages.
Innovative Leveling Valves for Faster Settling Time
Our three two-way leveling valves automatically re-level systems, offers a wide range of valves options starting from the standard valve with repeatability of ±0.1 mm to the precise valve with repeatability of ±0.05 mm. In addition, adding A.O.V valves to DVIM-M isolators, enables the isolators to settle the entire system rapidly in both vertical and horizontal axis by controlling the air flow, after the heavy stages motion occur.
Oil Damper Option for Faster Settling Time
When DVIM-M isolators are used with built-in oil dampers, the movements of XY linear stages are minimized, the payload settling time is reduced, and stiffness of the isolators are increased.
Semiconductor/FPD Manufacturing Inspection Systems
Optical Laser Equipment
*Settling time is measured after 90% reduction of input. (The settling time varies with several conditions, such as payload, force, natural frequency, etc.)