Application Note

Vibration Isolator: DVIM-M-300

Isolation Platform Type: Base Platform

Isolating equipment: Panasonic UA3P 3D Profilometer

Measuring objects: Aspherical lenses & molds, semiconductor wafers, and any other precision component requiring nanometer level accuracy ranging up to 200mm x 200mm.

Generic Vibration Criteria (Vibration Isolation Performance in VC-Curves)

Z-axis

Y-axis

X-axis

Vibration Acceleration Spectrum Graph (m/sec^2)

Z-axis

Y-axis

X-axis

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