Vibration Isolation Case Studies

DVIA-T67 (serial 221012R8) installation report for Pukyong National University Yongdum campus advanced practice building, first-floor analysis lab. Overview describes post-installation tuning and vibration measurement, turned-off inspection runs, and VC-curve data with Reference. Floor vibration VC-A to VC-D by axis was reduced to VC-G on the isolator; conclusion states vibration remained below VC-F across directions and bands. Plots: VC curves, autospectra, transmissibility, installation photos; Reference table as published.

DVIA-T67 DEMO inspection and vibration report at Youngil Precision Ansan site 5F OQA room — Keyence VR-6000 3D profile measurement system. Tuning and vibration measurement with equipment Turned on/IDLE; intermittent fault analysis, VC-curve plots by axis, and Reference table.

Installation report for DVIA-T87 (serial 250922R2) at Robocube Tech assembly hall: tuning and vibration measurement with equipment installed and Turned on/IDLE. Verification covered auto-leveling under load changes and isolation performance including under applied excitation. Axis VC curves, autospectra, transmissibility, and VC reference guidance are published.

DVIA-T78 (serial 211213R1) installation report for WONIK IPS Jinwi site, 4F wafer analysis lab: tuning and vibration measurement on November 25, 2025, with Bruker Nano Indentation tester TS77 on the isolator. Two vibration measurement rounds (isolator plate vs floor, then instrument floor vibration). Measurement report written November 27, 2025. VC curves with floor vs DVIA traces, autospectra and transmissibility by axis on the isolated stage, followed by VC and autospectrum curves for equipment-floor vibration alone. Measurement tables include floor-vs-isolator pass/fail notation in the Vertical direction.

DVIA-T67 (serial 170718R8) tuning and vibration measurement at Tier-1 Semiconductor Cheongju campus P&T6 4th-floor cleanroom K16 for Olympus 3D Measuring Razer Microscope OLS4100. LNSTECH (엘앤에스텍) customer vs Tier-1 Semiconductor end-user site lines match the Word form. Figures: VC, autospectrum, and transmissibility for vertical, left-to-right, and front-to-back axes; Generic Vibration Criteria as a markdown Reference table only (no EMF artwork). Engineer Chaewon Lee (DAEIL SYSTEMS); measurement November 3, 2025; report written November 11, 2025.

DVIA-T76 (serial 250715R2) inspection report for Mutec Korea 1F cleanroom. Settling-time tuning reduced top-plate response from about 6 s to about 2 s at maximum stage speed; vibration measurement with equipment installed and Turned on/IDLE. Customer tool: Mutec Korea semiconductor inspection equipment model MG. Plots include before/after settling comparison and axis VC curves, autospectra, and transmissibility; Reference publishes the standard VC criteria table.