Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
Equipment Type
Manufacturer
All Case Studies

YOUSHIZE TECH ZEISS GeminiSEM 360 FIB-SEM DVIA-ML1000 Installation Report
YOUSHIZE TECH ZEISS GeminiSEM 360 FIB-SEM DVIA-ML1000 installation report — following installation at Yancheng for end user Yancheng High-tech Zone, the DVIA-ML1000 active vibration isolation platform was tuned and measured with the equipment in the IDLE state, with the floor and the DVIA-ML1000 platform both passing on the vertical, left-to-right, and front-to-back axes. The tuning request, vibration specification, per-axis Autospectrum plots, and the installation photo are published.

YIMO TECH Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 Installation Report
YIMO TECH Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 installation report — following installation at Shizuishan for end user Ningxia Orient Tantalum Industry Co. Ltd., the DVIA-ML1000 active vibration isolation platform meets the VC-F vibration specification (the floor fails on vertical, left-to-right, and front-to-back, while the DVIA-ML1000 platform passes all three axes). The tuning request form, per-axis VC Curves, and the installation photo are published.
Tier-1 Semiconductor Giheung ZEISS Xradia 520 Versa DVIA-ML3000 (260319R2) Installation Report
DVIA-ML3000 (260319R2) installation report at Tier-1 Semiconductor Giheung campus S1 Line, 1F laboratory — ZEISS X-ray Microscope Xradia 520 Versa. VC-C equipment spec; B&K Front End Type 3040-A-040 with Pulse Labshop22 and a PCB 393B05 accelerometer; per-axis VC Curves and Autospectrum for vertical, left-to-right, and front-to-back; standard Reference vibration criteria as a markdown table.

YIMOTECH Thermo Fisher Helios 5CX FIB-SEM DVIA-ULF1000 Installation Report
YIMOTECH (End User Citic Metal, Beijing, China) Thermo Fisher Scientific FIB-SEM Helios 5CX DVIA-ULF1000 installation report — after installation, tuning and vibration measurement were performed with the equipment in the IDLE state and represented in VC Curve format against the VC-F specification. On the DVIA-ULF1000 platform all three axes (Vertical, Left-to-Right, Front-to-Back) passed; on the floor all three axes failed. The tuning request capture, per-axis VC Curves, and an installation photo are published.

YDRICQS Thermo Fisher Scientific Helios 5CX FIB-SEM DVIA-ML1000 Installation Report
YDRICQS (Quantum Science and Technology Yangtze River Delta Industrial Innovation Center, Suzhou, China) Thermo Fisher Scientific Helios 5CX FIB-SEM DVIA-ML1000 installation report — the active isolation platform meets the VC-F vibration specification on all axes (floor fails only on vertical; the DVIA-ML1000 platform passes vertical, left-to-right, and front-to-back). Per-axis Auto Spectrum and VC curves, the client tuning request form, and the installation photo are published.

Tier-1 Semiconductor Giheung Hitachi In-Line SEM XF-1000 DVIA-P10000 Installation Report
Tier-1 Semiconductor Giheung NRD K-Line 4F Hitachi In-Line SEM XF-1000 DVIA-P10000 periodic inspection (VOC26-125) — measurement performed with the equipment Turned on/IDLE; vertical and left-to-right axes PASS on both floor and platform, front-to-back floor FAIL while the DVIA-P10000 platform meets the requirement on all axes.