Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Hyundai Motor Keyence Laser Confocal Microscope VK-3000 DVIA-TD45 Installation Report
Hyundai Motor Environmental Technology Research Center Keyence Laser Confocal Microscope VK-3000 DVIA-TD45 installation report — isolator oscillation diagnosed and re-tuned to meet the VC-C requirement; the DVIA-TD45 platform passes on all axes while floor left-to-right fails, with ventilation-duct airflow noted as an additional influence.

Robocube Tech 6-Axis Actuator DVIA-T87 (260423R2) Installation Report
Installation report for the DVIA-T87 (serial 260423R2) supplied to Robocube Tech. After installation in the Robocube Tech assembly room, tuning and vibration measurement were carried out on 17 June 2026 with the unit in the IDLE state. All three axes — vertical (Z), left to right (X) and front to back (Y) — passed on both the floor and the DVIA-T87 top plate, and vibration on the top plate was confirmed to be attenuated relative to the floor on every axis. Per-axis Autospectrum and VC Curves measured with a B&K Front End Type 3050-A-040 and a PCB 393B05 accelerometer are published together with the IEST-RP-CC012.2 vibration criteria reference.

WONIK IPS DVIA-T78 (211213R1) Installation Report
DVIA-T78 (serial 211213R1) installation report for WONIK IPS Jinwi site, 4F wafer analysis lab. Re-tuning and vibration measurement on December 12, 2025, with Bruker Nano Indentation tester TS77 on the isolator. Overview notes a return visit due to high vibration against Bruker self-test criteria; conclusion confirms good isolator performance in all directions while Bruker cited rubber pillars below the tool and planned equipment modification with headquarters. UI plots: VC curves, autospectra, and transmissibility by axis. Reference publishes the standard VC criteria table.

Shanghai Opotong Instruments COXEM EM 40 DVIA-T56 (260202R1-6) Re-Tuning Report
DVIA-T56 re-tuning report (reference 260202R1-6) for a COXEM Tabletop SEM EM 40 at Shanghai Opotong Instruments Co., Ltd., Shanghai, China. Overview documents re-tuning due to active vibration oscillation. Vibration Specification shows N/A with the engineer explanatory note verbatim; tuning trial and tuning request match the report. Equipment condition wording is unchanged from the report. Measurement summary compares floor versus DVIA-T56 with equipment turned on. Measurement Data Obtained via UI Program publishes VC curves, Autospectrum, and Transmissibility for vertical, left-to-right, and front-to-back axes. Includes the equipment photograph from the reference report. Reference uses the standard Generic Vibration Criteria markdown table only (Word Reference EMF omitted). Decorative header imagery before the title block is omitted from the public page.

Shuyu Industrial SCINCO STA 1000 DVIA-T56 (250102R2-2) Re-Tuning Report
DVIA-T56 re-tuning report (serial 250102R2) for SCINCO STA 1000 at Shuyu Industrial Co., Ltd. Overview documents re-tuning due to active vibration oscillation. Vibration specification and tuning request read N/A; equipment condition matches the report wording. Measurement summary compares floor versus DVIA-T56 under turned-on equipment state. Measurement Data Obtained via UI Program publishes VC curves, Autospectrum, and Transmissibility for vertical, left-to-right, and front-to-back axes. Equipment photography was not permitted on site. Reference uses the standard Generic Vibration Criteria markdown table only (Word Reference EMF omitted). Decorative header strip before the title block is omitted from the public page.

WONIK IPS DVIA-T78 (211213R1) Installation Report
DVIA-T78 (serial 211213R1) installation report for WONIK IPS Jinwi site, 4F wafer analysis lab. Overview: inspection of the installed isolator, Turned on/IDLE vibration measurement, and VC-curve data with Reference. Customer tool Bruker Nano Indentation tester TS77. Installation 26.04.29, tuning and vibration measurement on April 29, 2026. UI plots: VC curves, autospectra, and transmissibility by axis; §14-2 compares steady-state vibration data with data captured during TS77 image noise events. Conclusion states the isolator meets strong attenuation targets and that noise correlation points to elevated building-floor energy in 1–10 Hz rather than isolator malfunction; relocation to a quieter floor is recommended. Reference publishes the standard VC criteria table (no separate vibration-spec figure in the source form).