Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
Equipment Type
Manufacturer
All Case Studies
Sungkyunkwan University Raith EBPG5150 DVIA-P4000 Inspection Report
DVIA-P4000 (serial 220714R4) inspection at Sungkyunkwan University Research Building 3F cleanroom with Raith EBPG5150. Inspection February 19, 2024; Data Physics QUATTRO / SignalCalc ACE. VC summary tables for Active on and Float off, axis VC curves at Floor, isolator, equipment cover, and equipment top, plus an installation photo.
MIT Menlo Sub-Hz Optical Reference DVIA-T45 (211206R5-4) Inspection Report
DVIA-T45 inspection at MIT Room 26-340 for the Menlo sub-Hz linewidth optical reference system: remote RS-232 cable compatibility, bracket removal, Common Potentiometer float-height adjustment, and Z/X/Y transmissibility verification to −20 dB to −25 dB at 5 Hz and 10 Hz.
Tier-1 Semiconductor DVIA-M-THT3 (230818R1-2) internal program worksheet — setup 2024.02.04
DVIA-M-THT3 internal-program screenshots (serial 230818R1-2): worksheet with setup dated 24.02.04, reporting dated 24.07.05, remark Good Performance, and three internal-program plots (Vertical, Left to Right, Front to Back). Target equipment, installation site, and end user fields were not filled on the worksheet (N/A on the web). Measurement date 2024.02.04 (Sunday); operator Chaewon Lee (DAEIL SYSTEMS). No vibration specification section, equipment-condition block, tuning-request capture, measurement summary table, or Reference section appear on the source handout.
TESCAN Solaris GMH FIB-SEM DVIA-M1000 (230509R6-3) — Pengxin Micro, 2024-01-31
Pengxin Micro — TESCAN Solaris GMH FIB-SEM on DVIA-M1000 serial 230509R6-3. M1000 internal program performance measurement (Z / X / Y) from the 2024.01.31 handout.
Tier-1 Semiconductor DVIA-MB3000 (230818R1-2) Installation Worksheet — setup 2024.02.01
DVIA-MB3000 isolation platform (serial 230818R1-2): on-site worksheet with setup dated 2024.02.01, reporting dated 2024.07.05, remark Good Performance, and three internal-program screenshots (Vertical, Left to Right, Front to Back). End user and installation site fields were left blank on the worksheet (shown as N/A on the web). Engineer Byeonghun Cho (DAEIL SYSTEMS).
ZEISS Korea Innovation Center DVIA-MB1000 (231128R4), ZEISS FIB-SEM Crossbeam 550 Installation Report
DVIA-MB1000 installation report (serial 231128R4) prepared for ZEISS for the Crossbeam 550 installation at ZEISS KOREA Innovation Center (Hwaseong). Overview and conclusion follow the bilingual report wording; vibration results include the Floor vs Active summary table plus UI-program Transmissibility curves, VC curves by axis (Data Physics QUATTRO description graph), manufacturer equipment specification figure, installation photo; Reference publishes the Generic Vibration Criteria markdown table only (reference graphic omitted). Decorative header/logo raster from Word excluded.