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Installation Report
DVIA-T Series
03-11-2024

LG Chem METTLER TOLEDO XPR205 DeltaRange DVIA-T67 (240306R1) Installation Report

DVIA-T Series
Installation Report
LG Chem
METTLER TOLEDO
XPR205 DeltaRange
DVIA-T67
240306R1

Prepared for

LG Chem

Prepared by

Engineer: Jongwon Park

Installation date: 24.03.11

Report written date: 24.03.11

Overview

LG사이언스파크 데모 적용 건으로 E8동 3층 연구실에 DVIA-T67(DEMO)을 설치했습니다.

DVIA-T67을 PC와 연결하여 UI Program을 통한 설치 튜닝, 진동측정 장비를 이용한 점검 진행했습니다.

System Information

Model: DVIA-T67

Serial Number: 240306R1

Engineer

Jongwon Park from DAEIL SYSTEMS

Installation Date

March 11, 2024

Location

LG Science Park E8, Magok

Equipment

METTLER TOLEDO XPR205 DeltaRange

Number of Tuning Trial

1회차

Equipment Condition

Equipment is installed / Idle

Measurement Device

9.1) Data Physics FFT Analyser

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

9.2) Measurement Setting

Bandwidth: 1 - 80Hz

Lines: 800

Window: Hanning

Averaging: FFT Spectrum Averaging

Engineering Units: m/s

9.3) Accelerometer

PCB Accelerometer

Model: 393B05

9.4) Measurement Method

상부(Top plate), 하부(Floor)에 진동 측정용 가속도 센서를 부착합니다.

Vertical, Left to Right, Front to Back 방향으로 진동을 측정합니다.

측정 Data를 VC Curve Graph에 표기하였습니다.

Conclusion

Vertical 방향의 25 Hz에서 Operating Theatre (ISO)부터 VC-F까지 지반진동이 감쇠 되었습니다. 25 Hz를 제외한 나머지 주파수 대역에서 VC-G입니다.

Left to Right 방향의 12.5 Hz에서 Operating Theatre (ISO)부터 VC-F까지 지반진동이 감쇠 되었습니다.

Front to Back 방향의 12.5 Hz에서 VC-A부터 VC-G까지 지반진동이 감쇠 되었습니다.

VC-F, VC-G 수준은 high-end TEM 진동스펙입니다.

Summary of Vibration Results

Measurement PointVertical1-10 HzVertical12.5-80 HzLeft to Right 1-10 HzLeft to Right 12.5-80 HzFront to Back 1-10 HzFront to Back 12.5-80 Hz
FloorCOperating Theatre (ISO)BOperating Theatre (ISO)BA
DVIA-T67GFFFFG

Data and Image

UI Program Transmissibility

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

12.2 Vibration Measurement

Vertical VC Curve (rms Velocity, m/s)

Left to Right VC Curve (rms Velocity, m/s)

Front to Back VC Curve (rms Velocity, m/s)

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-T Series
Date03-11-2024
Tags
DVIA-T Series
Installation Report
LG Chem
METTLER TOLEDO
XPR205 DeltaRange
DVIA-T67
240306R1