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Installation Report
DVIA-M Series
03-07-2024

Chan Zuckerberg Imaging Institute MB1000 Helios/Hydra Installation Report (2024-03-07)

DVIA-M Series
Installation Report
MB1000
Chan Zuckerberg Imaging Institute
Thermo Fisher Scientific
Helios
Hydra
VEC
240110R3

Introduction

This report provides the details of the installation of the MB1000 for the TFS Helios/Hydra at 3400 Bridge Parkway, Redwood City, CA 94065. Chan Zuckerberg Imaging Institute hired VEC to install the vibration isolation system and provide a report of the completed work.

Summary Results

Below is a summary of the results:

MB1000 ON PASSED the Vibration specifications

Product Details

Part DeliveredSerial NumberSoftware
MB1000240110R3Site-specific Tune

Summary of Work

We installed the system by

Positioning the daeil under the microscope

Leveling the daeil to within .5mm

Attaching seismic restraints between the floor and the daeil

Connecting the seismic restraints between the daeil and the tool

We tested the system by

Creating and uploading a site specific tune

Collecting vibration data to verify the performance

We left the system

In position and on

Procedures

Vibration

VEC conducted vibration measurements in three directions. Acceleration measurements were taken at a bandwidth of 250Hz with units of G (RMS). The acceleration spectra with 250Hz bandwidths were recorded.

Setup

Vibration
Bandwidth250Hz
Lines3200
WindowHanning
CouplingICP 2mA
Average TypeStable
Duration60 seconds
Engineering UnitsG (RMS)

Data

Figure 1: Vibration (Z-Axis - Floor)

Figure 2: Vibration (Z-Axis - Table)

Figure 3: Vibration (Z-Axis – Floor, Table and Specification)

Figure 4: Vibration (Z-Axis - Transmissibility)

Figure 5: Vibration (Y-Axis - Floor)

Figure 6: Vibration (Y-Axis - Table)

Figure 7: Vibration (Y-Axis – Floor, Table and Specification)

Figure 8: Vibration (Y-Axis - Transmissibility)

Figure 9: Vibration (X-Axis - Floor)

Figure 10: Vibration (X-Axis - Table)

Figure 11: Vibration (X-Axis – Floor, Table and Specification)

Figure 12: Vibration (X-Axis - Transmissibility)

Figure 13: Room (View 1)

Figure 14: Room (View 2)

Figure 15: Microscope (View 1)

Figure 16: Microscope (View 2)

Figure 17: Microscope (View 3)

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm line widths.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date03-07-2024
Tags
DVIA-M Series
Installation Report
MB1000
Chan Zuckerberg Imaging Institute
Thermo Fisher Scientific
Helios
Hydra
VEC
240110R3