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Installation Report
DVIA-M Series
09-11-2025

Thermo Fisher Scientific TFS Helios (Brigham Young University) DVIA-ML1000 (250708R4-3) Installation Report

DVIA-M Series
Installation Report
Thermo Fisher Scientific
Brigham Young University
Helios
DVIA-ML1000

Introduction

This report provides a record of the vibration isolation installation and vibration measurement for this site. Please use this report for future reference regarding installation specifics.

Summary Results

Below is a summary of the results:

ML 1000 ON PASSED the Vibration specifications

Product Details

Part DeliveredSerial NumberSoftware
ML 1000250708R4-3Site Specific Optimization

Vibration Isolation System Info

Model: DVIA-ML1000

Serial Number: 250708R4-3

Engineer

Phillip Macdonald, Director of Installations

Work completed

September 11, 2025

Report date

September 10, 2025

End User

Felipe Rivera, A-153 ASB, Provo, UT 84602

Installation Site

Brigham Young University, Electron Microscopy Facility, A 116

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: TFS Helios

Electron Microscopy Facility designation: A 116

Equipment Status

System in position and operational.

Summary of Work

We installed the system by

Providing lifting services

Positioning the daeil under the microscope

Leveling the daeil to within .5mm

Connecting the compressed air line to the air supply line for the tool

We tested the system by

Creating and uploading a site specific tune

Collecting vibration data to verify the performance

We left the system

System in position and operational

Installer's Notes

We used BYU's Microscope lift to install the Helios 1 onto the DVIA ML1000. The data shows that there was onboard vibration from the Helios at the time of data collection. The peaks are most notable at 32 and 50 Hz in the vertical direction and 25Hz in the horizontal direction. These vibrations don't exceed the specification and should not affect tool performance.

Procedures

Vibration measurements were conducted in three directions using calibrated seismic accelerometers at a bandwidth of 200 with units of m/s (RMS).

Measurement setup

Bandwidth: 200

Lines: 3200

Window: Hanning

Coupling: ICP 2mA

Average Type: Stable

Duration: 60 seconds

Engineering Units: m/s (RMS)

X Axis Scaling: 1/3 Octave

Specifications

The following specifications apply to this project.

Specification summary

Tool: TFS Helios

Vibration

Vertical-Axis — VC-F

Left-Right, Front-Back-Axis — VC-G

Detailed specifications

Results

Summary Results

Below is a summary of the results:

ML 1000 ON PASSED the Vibration specifications

Detailed Results

Detailed Results — TFS Helios

TypePositionDirectionSpecificationMeasurementResult
VibrationFloorVerticalVC-FVC-EFAIL
VC-EFAIL
Left-RightVC-GVC-FFAIL
Front-BackVC-FFAIL
DVIA MLVerticalVC-FVC-GPASS
VC-FPASS
Left-RightVC-GVC-GPASS
Front-BackVC-GPASS

Data and Image

Figure 2: Vibration vertical floor

Figure 3: Vibration vertical DVIA

Figure 4: Transmissibility vertical

Figure 5: Vibration left-right floor

Figure 6: Vibration left-right DVIA

Figure 7: Transmissibility left-right

Figure 8: Vibration front-back floor

Figure 9: Vibration front-back DVIA

Figure 10: Transmissibility front-back

Figure 11: Installation detail

Figure 12: Compressed air

Figure 13: Serial number

Figure 14: Room overview

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date09-11-2025
Tags
DVIA-M Series
Installation Report
Thermo Fisher Scientific
Brigham Young University
Helios
DVIA-ML1000