The Most Advanced Active Vibration Isolation System for

Semiconductor/FPD Manufacturing 

  • Designed to support semiconductor inspection equipment

  • Active pneumatic vibration isolation mount platforms

  • Powerful  active pneumatic servo valve actuators

  • Support linear XY stages

  • Support up to 50,000 kg

  • Superior active vibration isolation performance

  • Feedback & Feed-forward Control Systems

Active Vibration Isolation System DVIA-P - DAEIL SYSTEMS

DVIA-P Series

Active Vibration Isolation System DVIA-MB - DAEIL SYSTEMS

DVIA-MB Series

Active Vibration Isolation 

Base Platform for

Ultra-Sensitive Measuring Equipment

  • 90% isolation at 2 Hz, 99% isolation at 10 Hz

  • Support up to 6000 kg

  • Feedback & Feed-forward Control Systems

  • Compatible with all commercial electron microscopes 

  • Custom-made Platform is available 

Hybrid Active Optical Table

  • Optical table platform

  • 90% Isolation at 2 Hz, 99% Isolation at 10 Hz

  • Support up to 6000 kg

  • Feedback & Feed-forward Control Systems

  • Customization is available 

Active Vibration Isolation System

DVIA-MO Series

Active Vibration Isolation System DIVA-UD

Desk Active Vibration Isolation Platform  

  • Desk platform 

  • Ergonomic design for seated users

  • 90% isolation at 5 Hz, 98% Isolation at 10 Hz

  • Feedback & Feed-forward Control Systems

  • Support up to 700 kg

  • Ideal for vibration-sensitive inspection systems

DVIA-UD Series

Base Active Isolation Platform

  • Base platform

  • Low-profile type

  • 90% isolation at 5 Hz, 99% Isolation at 10 Hz

  • Feedback & Feed-forward Control Systems

  • Support up to 700 kg 

  • Customization is available

Active Vibration Isolation System

DVIA-UB Series

Tabletop Active Vibration Isolation Platform

DVIA-T Series

Tabletop Active Isolation Platform

  • Tabletop platform

  • Plug N play (No air, Only AC power required)

  • Compact & light weight design

  • 90% isolation at 5 Hz, 99% isolation at 10 Hz

  • Feedback & Feed-forward Control Systems

  • Support up to 150kg

Copyright © 2020 DAEIL SYSTEMS CO.,LTD. All rights reserved.

40, Maengni-ro, Wonsam-myeon, Cheoin-gu, Yongin-si, Gyeonggi-do, Republic of Korea, Postal Code) 17166

Tel: +82-31-339-3375 

경기도 용인시 처인구 원삼면 맹리로 40 (주)대일시스템 우)17166

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