Active Vibration Isolation System

DVIA-ML Series

for Electron Microscopes

  • Overview
  • Features
  • Performance
  • Specifications

DVIA-ML1000 series is the upgraded version of DVIA-MB1000 series with the most advanced active vibration control algorithms, achieving superior vibration isolation performance at low frequencies. The height of a platform is only 182 mm, providing more space for tall electron microscopes. With the sophisticated feedback and feedforward controls and the best-in-class components and the design of DVIA-ML1000 outperforms other active vibration isolation systems available on the market.


Astonishing vibration isolation performance,delivering 80 – 90% vibration isolation at 1 Hz.

DVIA-ML with the embedded sophisticated vibration control algorithms starts isolate vibration from 0.5 Hz, providing 80 - 90% vibration isolation at 1 Hz .


Low-profile design for improved stability, more room.And custom design to meet your needs.

The height of DVIA-ML1000 platform is only 182 mm, which offers more room for tall electron microscope and makes the system more stable as the center of gravity is lowered.
DVIA-ML is designed according to specifications of electron microscopes.We can modify a shape, dimensions and color of a platform to suit customers' requirements.


Optimal System Design for Better Performance

Optimal system design details

Electromagnetic actuators

The electromagnetic actuators are located at the four corners of DVIA-ML platform, effectively creating force to control vibration.

Eleven Geophone Sensors

The highly sensitive geophone sensors are attached a bottom and a top plate of the platform, accurately measure vibration with excellent low frequency response starting at 0.3 Hz.

Pneumatic Spring

The pneumatic springs are highly adjustable based on the massof the payload and provide the low natural frequency improvingthe active vibration isolation performance below 10 Hz.


All-new feedback controlenabling optimization of open loop tuning.

The feedback control system constantly measures the isolated mass vibration and utilizes the electromagnetic actuators to create an equal and opposite force to attenuate vibration on the isolated mass. Although the isolation system works well out of the box, tuning the feedback open loops optimizes the isolation performance by adjusting the gains based on the isolated mass and using the new and advanced notch filters for accounting for structural resonances or vibration sources.


Sophisticated feedforward controlfor dramaticially Improved low-frequencyvibration isolation performance.

The feedforward control uses real-time ground sensor measurements to detect vibration and sends a signal to the actuators to cancel floor vibration before floor vibration transmitting to the isolated mass. DVIA-ML feedforward control dramatically improves the vibration isolation performance. With the dynamic control, the feedforward control easily adapts to the changing vibration level in facilities and does not require constant re-tuning to deliver the outstanding performance.


New PID tuning software,more PID gains, filtersfor stability and performance.

The new tuning software of DVIA-ML1000 provides more filters and gains to control vibration more efficiently. The number offilter slot has increased from 3 to 5 which allows us to delicately and accurately tune the active vibration isolation system. Thenew feedforward D gain and D frequency(Hz) provides excellent stability for tuning the active system below 10 Hz. Specially,we are able to attenuate vibration below 0.5 Hz with the new feedforward D gain control for the outstanding vibration isolationperformance. The new tuning software provides the open-loop transfer function from 0.1 Hz enables us to accurately checkthe phase margin so that we can stably adjust gain values for the superior low frequency vibration isolation performance.


Active Vibration Isolation in Six Degress of Freedom

DVIA-ML controls vibrations in three translational degrees of motions( X, Y and Z) and three rotational degrees of motions ( pitch, roll and yaw).


80 – 90% vibration isolation at 1 Hz

DVIA-ML1000 Performance
Model DVIA-ML1000
Dimensions Custom design
Maximum Load Capacity 1700 kg
Vibration Isolation Technology Feedback and Feedfoward Control
Degrees of freedom 6 Degrees
Active Isolation Bandwidth 0.5 - 200 Hz
Vibration Isolation 80 - 90% at 1Hz
Actuator Electromagnetic Actuator
Maximum Actuator Force Vertical 40 N, Horizontal 20 N
Vibration Sensor Geophone, Sensitivity: 2.55 N/in/s (100.4 V/m/s) ± 10%
Leveling Repeatability: ± 0.1mm
Controller Built-in
Environmental Protection Requirements CE and TUV
Power Requirements Line Voltage: 100 - 260V AC, LIne Frequency: 50 - 60 Hz
Air Requirements Air Pressure: 4 - 6 bar, Air Delivery: 30 L/min
Environmental Requirements Temperature: 5 - 50 ℃, Humidity: 20 - 90 %

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