Vibration Isolation Case Studies

LG Innotek (End User LG Innotek, 2F cleanroom of Gumi Plant 4) NanoSystem precision measurement equipment (white-light interferometer) DVIA-ULF1000 demonstration (demo test) report — after installation, tuning and vibration measurement were performed in the IDLE state and represented in VC Curve format. The platform achieved VC-F (Vertical), VC-E (Left to Right), and VC-D (Front to Back), confirming excellent vibration isolation performance. Per-axis autospectra and VC Curves, and installation photos are published.

Installation report of the DVIA-ULFB1000 vibration isolation platform for the Hitachi High-Tech TEM (HT7830) in the 1st-floor laboratory of the Hitachi Suwon NCK Center. After installation, tuning and vibration measurement were performed with the equipment idle. The floor vibration was already at the VC-E (Z) / VC-G (X, Y) level and the equipment specification was satisfied on all axes.

DVIA-P2200 installation report for a high vacuum chamber at the Korea Institute of Machinery & Materials (KIMM), Building L2 1F laboratory — tuning and vibration measurement performed with the equipment Turned off. No vibration specification was defined, and the measured floor/platform levels are reported as VC Curves on all axes.

Tuning and vibration measurement of the DVIA-P1000 installed for the EL High Vacuum Chamber in the 1st floor laboratory of Building L2 at Korea Institute of Machinery & Materials (KIMM). After reconnecting the air pipes as independent lines, excellent vibration isolation performance was confirmed on all axes in the Turn-off state.

DVIA-ML1000 installation report (serial 260725R2) for an attocube attoDRY1000/SU closed-cycle cryostat at Quantum Photonics Research Laboratory in Copenhagen, Denmark. Tuning was carried out on 2026.09.22, and vibration on the isolator top plate was verified against the customer VC-E requirement on all axes.

DVIA-ULF700 installation report (serial 260605R7) for a ZEISS FE-SEM Sigma 360 at Hubei Jinquan in Hubei. A 2nd tuning was carried out on 2026.09.21 at the customer's request after the initial tuning on 2026.09.08. With the equipment in the Idle state, vibration levels on the DVIA-ULF700 met the specification on all three axes, while the floor vibration exceeded the specification on all axes.