DVIM Series
Pneumatic Vibration Isolators
for
Flat Panel Display Metrology
The DVIM Series provides much damping,
and it is a subsystem that used in flat panel display metrology equipment
with motorized linear XY stages to minimize vibrations and most importantly,
they stabilize the equipment after the stage motions occur.
The DVIM Series offers a fast payload settling time, exceptional vibration isolation performance,
and superior damping. Since the linear XY stages travels with different speed and forces,
we suggest customers to consult with us to choose the optimal pneumatic vibration isolators.
DVIM-G
Advanced Pneumatic Vibration Isolator
- Highest level of damping
- Fastest payload settling time
- Superior horizontal & vertical vibration isolation
- Two-chamber & Variable orifice features
- High precision leveling valve & A.O.V valve options
- Maximum Load Capacity Per Isolator: 6000 kg
Standard Pneumatic Vibration Isolator
- Standard damping level
- Fast payload settling time
- Standard horizontal & vertical vibration isolation
- Three two-way leveling valves
- High precision leveling valve & A.O.V valve options
- Maximum Load Capacity Per Isolator: 4500 kg
DVIM-M
DVIM-F
Basic Pneumatic Vibration Isolator
- Basic damping level
- Cost-effective as to build a subsystem for XY stages
- High durability
- Three two-way leveling valves
- Max load per isolator : 3,000 kg