Vibration Isolation Case Studies

Installation report of DVIA-ULF700 (S/N 260902R5) at Linhai, Zhejiang for (End User: Xintaijia Optoelectronics), serving a ZEISS Sigma 360 FE-SEM. Tuning and vibration measurement were performed in the Idle state with data in Autospectrum format; a structural resonance near 10 Hz on the horizontal X-axis was suppressed by controller tuning, and the DVIA-ULF700 met the customer vibration specification on all axes.

Installation report of DVIA-ULF700 (S/N 260901R1) at the Delta Electronics site in Shanghai, serving a ZEISS EVO 15 SEM. Tuning and vibration measurement were performed in the Idle state with data in Autospectrum format; the isolator met the EVO 15 vibration specification in all three axes.

Installation report of DVIA-ULF 1000 (S/N 250923R4) at Xi’an for (End User: Xi’an Jiaotong University Testing Center), serving a ZEISS Gemini SEM 560. Tuning and vibration measurement were performed in the Idle state with data in Autospectrum format; a resonance around 2–3 Hz on the horizontal axes was observed, and all measured axes passed against the customer vibration specification.

LG Innotek (End User LG Innotek, 2F cleanroom of Gumi Plant 4) NanoSystem precision measurement equipment (white-light interferometer) DVIA-ULF1000 demonstration (demo test) report — after installation, tuning and vibration measurement were performed in the IDLE state and represented in VC Curve format. The platform achieved VC-F (Vertical), VC-E (Left to Right), and VC-D (Front to Back), confirming excellent vibration isolation performance. Per-axis autospectra and VC Curves, and installation photos are published.

Installation report of the DVIA-ULFB1000 vibration isolation platform for the Hitachi High-Tech TEM (HT7830) in the 1st-floor laboratory of the Hitachi Suwon NCK Center. After installation, tuning and vibration measurement were performed with the equipment idle. The floor vibration was already at the VC-E (Z) / VC-G (X, Y) level and the equipment specification was satisfied on all axes.

DVIA-ULF700 installation report (serial 260605R7) for a ZEISS FE-SEM Sigma 360 at Hubei Jinquan in Hubei. A 2nd tuning was carried out on 2026.09.21 at the customer's request after the initial tuning on 2026.09.08. With the equipment in the Idle state, vibration levels on the DVIA-ULF700 met the specification on all three axes, while the floor vibration exceeded the specification on all axes.