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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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184 case studies
ZEISS Sigma360 FE-SEM DVIA-ULF700 Installation Report
Installation Report
DVIA-ULF Series
09-04-2026

ZEISS Sigma360 FE-SEM DVIA-ULF700 Installation Report

DVIA-ULF700 installation report (serial 260605R5) for a ZEISS Sigma360 FE-SEM at End User Inner Mongolia Xingfa Technology Co., Ltd. in Wuhai. Tuning was carried out on 2026.09.04 and vibration was measured with the equipment in the IDLE state at two points, the installation floor and the top surface of the DVIA-ULF700. At the floor all three axes failed the specified criterion; on the DVIA-ULF700 all three axes (Vertical, Left to Right, Front to Back) satisfied the ZEISS specification, confirming that the isolator attenuates the ambient vibration. Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and one installation photo.

ETRI Attocube AttoDRY 2100 Cryostat DVIA-ULFB700 Installation Report

Installation report for the DVIA-ULFB700 vibration isolation platform (S/N 260707R4) supporting an Attocube AttoDRY 2100 cryostat in Room L02, Building 2 of the Electronics and Telecommunications Research Institute (ETRI). Tuning and vibration measurement were performed with the equipment in the IDLE state against a 3.125 µm/s RMS (VC-E) requirement in both the horizontal and vertical directions. On the floor all three axes failed the requirement, while on the isolated DVIA-ULFB700 platform all three axes passed: after the first round of tuning the vertical axis reached VC-F and the horizontal axes reached VC-E. Per-axis VC Curves for the Z, X and Y axes are published.

ZEISS Sigma 360 FE-SEM DVIA-ULF700 Installation Report
Installation Report
DVIA-ULF Series
08-20-2026

ZEISS Sigma 360 FE-SEM DVIA-ULF700 Installation Report

DVIA-ULF700 installation report (serial 260511R3) for a ZEISS Sigma 360 FE-SEM at End User Jiechuang Trading in Shanghai, China. Tuning was carried out on 2026.08.20 and vibration was measured with the equipment in the Idle state at two points, the installation floor and the top surface of the DVIA-ULF700. The floor failed the vertical criterion while both horizontal axes passed; on the DVIA-ULF700 all three axes (Vertical, Left to Right, Front to Back) satisfied the ZEISS specification, confirming that the isolator fully attenuates the vertical exceedance present in the site. Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and two installation photos.

ZEISS EVO 10 SEM DVIA-U1000 Installation Report (2nd Tuning)
Installation Report
DVIA-ULF Series
08-11-2026

ZEISS EVO 10 SEM DVIA-U1000 Installation Report (2nd Tuning)

DVIA-U1000 active vibration isolation platform (serial 241217R6) supporting a ZEISS EVO 10 SEM at End User Shanghai Fasteners and Welding Materials Technology Research Institute Co., Ltd. (上海紧焊所) in Shanghai, China, reported. This is the 2nd tuning trial on the same unit: the platform was retuned on 2026.08.04 and vibration was measured with the equipment in the Turned off state. Published figures are the Chinese-language tuning request work order (调试请求书), the per-axis transmissibility traces captured from the DAEIL UI program for Vertical (Z), Left to Right (X) and Front to Back (Y), and an installation photo of the EVO 10 seated on the DVIA-U Series platform. The source report contains no vibration specification section and no pass/fail measurement summary table, so none is shown here.

ZEISS Sigma 360 FE-SEM DVIA-ULFB700 Installation Report
Installation Report
DVIA-ULF Series
08-05-2026

ZEISS Sigma 360 FE-SEM DVIA-ULFB700 Installation Report

DVIA-ULFB700 installation report (serial 260203R2) for a ZEISS Sigma 360 FE-SEM at End User Hubei University of Technology in Wuhan, China. Tuning on 2026.08.04 covered air pressure setting and per-axis control gain adjustment; vibration was then measured with the equipment Turned off, and both the floor and the DVIA-ULFB700 platform met the ZEISS vibration specification on all three axes (Vertical, Left to Right, Front to Back). Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and an installation photo of the installed Sigma 360.

Sensofar Sneox Optical Profilometer DVIA-ULFD350 Installation Report

Sensofar Sneox optical profilometer DVIA-ULFD350 installation report — after installation at Suzhou for end user Heihe Electronics Co., Ltd., the DVIA-ULFD350 active vibration isolation platform was tuned and measured with the equipment in the IDLE state. The floor measured VC-E vertically and VC-F left-to-right and front-to-back, while on the DVIA-ULFD350 platform all three axes reached VC-G. The tuning request work-order form, per-axis Autospectrum and VC Curves plots, and the installation photo are published.