Vibration Isolation Case Studies

JEOL JEM-F200 TEM DVIA-MB3000 Installation

DVIA-P4000 operation report (serial 240424R1) for ASML E-beam wafer inspection system eScan 460 at Wuxi, China. Equipment uninstalled; vibration specification VC-D in all axes. Report written 24.09.03 by Chaewon Lee. Published top-plate and floor accelerometer sensor data confirming normal platform operation after installation.

DVIA-P2200 (serial 240501R1) installation report at Kyungpook National University Semiconductor Fusion Research Building B1 with JEOL JBX-8100FS electron beam lithography. Tuning and vibration measurement on September 3, 2024; engineer Chaewon Lee (DAEIL SYSTEMS). Published equipment vibration specification diagram and axis VC, narrowband, and transmissibility plots. Reference uses the Generic Vibration Criteria markdown table only.

TESCAN Solaris X FIB-SEM DVIA-ML1000 Installation

DVIA-M1000 installation report (serial 240704R3-1) for ZEISS SEM EVO 10. Overview matches the published form. Equipment condition: The equipment is installed. Published figures include UI-program plots as listed; Reference uses the standard Generic Vibration Criteria markdown table.

DVIA-STONE-300 handout (serial 240513R3) titled (STONE-300_ 240513R3 Set up) with setup 24.08.13 and reporting 24.08.16. Thermo Fisher Spectra 300 S/TEM is recorded for Southern University of Science and Technology, Shenzhen. Overview, table fields, and measurement metadata follow the report verbatim; STONE-300 internal program screenshots are published under Vertical, Left to Right, and Front to Back. The worksheet does not include a separate vibration specification section, measurement summary table, or Reference section.