Kyungpook National University JEOL JBX-8100FS DVIA-P2200 Installation Report
Contents
Overview
SET-UP was performed after equipment placement on the DVIA-P2200 installed at Kyungpook National University.
Vibration measurement and tuning were performed with the equipment Turned on.
DVIA-P2200 was connected to a laptop; feedback and feedforward tuning were performed through the UI software, and vibration measurement with Data Physics equipment was used for performance verification.
Data are presented as VC curves together with reference materials on vibration levels.
Vibration Isolation System Information
Model: DVIA-P2200
Serial Number: 240501R1
Engineer
Chaewon Lee from DAEIL SYSTEMS
Installation Date
July 2, 2024
Installation Site
경북대학교 반도체융합연구동 B1
Prepared for
JEOL KOREA
End User
경북대학교
Equipment Information
Manufacturer: JEOL
Equipment: Electron Beam Lithography
Model: JBX-8100FS
Vibration specification
Equipment Status
설치완료/가동중
Tuning Sessions
2회차
Measuring Equipment
10.1) Data Physics
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200
Lines: 3200
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units: m/s
Conclusion
Vibration measurement results show very large floor vibration near 30 Hz in Vertical, Left to Right, and Front to Back.
In Vertical, Left to Right, and Front to Back, equipment vibration specifications are satisfied in all bands except near 30 Hz.
Measurement Data
| Measuring site | Status | Direction | Equipment spec | Measuring value (Floor) | Measuring value (DVIA-P2200) | Result (Floor) | Result (DVIA-P2200) |
|---|---|---|---|---|---|---|---|
| 위치: 반도체융합연구동 1.하부패드 2.DVIA-P2200 | 설치완료/가동중 | Vertical | 3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz | 2.09E-06 m/s @ 1 Hz | 1.21E-06 m/s @ 1 Hz | VC-E | VC-F |
| 5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz | 2.60E-06 m/s @ 2.5 Hz | 9.35E-07 m/s @ 2.5 Hz | VC-E | VC-F | |||
| 3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz | 2.17E-06 m/s @ 5 Hz | 1.21E-06 m/s @ 5 Hz | VC-E | VC-F | |||
| 6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz | 1.77E-06 m/s @ 10 Hz | 1.60E-06 m/s @ 10 Hz | VC-E | VC-E | |||
| 2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz | 2.74E-06 m/s @ 12.5 Hz | 4.37E-07 m/s @ 12.5 Hz | VC-E | VC-G | |||
| 2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz | 9.13E-06 m/s @ 16 Hz | 6.24E-07 m/s @ 16 Hz | VC-C | VC-G | |||
| 1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz | 2.99E-05 m/s @ 31.5 Hz | 8.35E-06 m/s @ 31.5 Hz | VC-A | VC-C | |||
| Left to Right | 3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz | 9.80E-07 m/s @ 1.6 Hz | 5.47E-06 m/s @ 1.6 Hz | VC-F | VC-G | ||
| 5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz | 1.11E-06 m/s @ 2.5 Hz | 4.19E-07 m/s @ 2.5 Hz | VC-F | VC-G | |||
| 3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz | 1.10E-06 m/s @ 8 Hz | 1.60E-07 m/s @ 8 Hz | VC-F | VC-G | |||
| 6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz | 1.27E-06 m/s @ 10 Hz | 1.66E-07 m/s @ 10 Hz | VC-F | VC-G | |||
| 2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz | 2.14E-06 m/s @ 12.5 Hz | 2.75E-07 m/s @ 12.5 Hz | VC-E | VC-G | |||
| 2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz | 8.72E-06 m/s @ 16 Hz | 1.08E-06 m/s @ 16 Hz | VC-C | VC-F | |||
| 1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz | 4.50E-05 m/s @ 31.5 Hz | 1.36E-05 m/s @ 31.5 Hz | VC-A | VC-B | |||
| Front to Back | 3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz | 1.18E-06 m/s @ 1 Hz | 1.55E-06 m/s @ 1 Hz | VC-F | VC-F | ||
| 5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz | 1.07E-06 m/s @ 2 Hz | 4.90E-07 m/s @ 2 Hz | VC-F | VC-G | |||
| 3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz | 1.37E-06 m/s @ 8 Hz | 5.37E-07 m/s @ 8 Hz | VC-F | VC-G | |||
| 6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz | 1.77E-06 m/s @ 10 Hz | 3.08E-07 m/s @ 10 Hz | VC-E | VC-G | |||
| 2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz | 2.68E-06 m/s @ 12.5 Hz | 8.37E-07 m/s @ 12.5 Hz | VC-E | VC-F | |||
| 2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz | 6.74E-06 m/s @ 16 Hz | 5.33E-06 m/s @ 16 Hz | VC-C | VC-D | |||
| 1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz | 2.13E-04 m/s @ 31.5 Hz | 2.34E-05 m/s @ 31.5 Hz | OFFICE | VC-B |
Data and Image
Vertical VC Curves
Vertical Narrowband
Vertical Transmissibility
Left to Right VC Curves
Left to Right Narrowband
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Narrowband
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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