Kyungpook National University JEOL JBX-8100FS DVIA-P2200 Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-P2200 after equipment placement and SET-UP at Kyungpook National University.
Vibration measurement and tuning were performed with the equipment turned on.
The DVIA-P2200 was connected to a laptop; feedback and feedforward tuning were carried out through the UI software, and performance was checked by vibration measurement using Data Physics equipment.
Data are presented as VC curves along with reference materials for vibration level assessment.
Vibration Isolation System Information
Model: DVIA-P2200
Serial Number: 240501R1
Engineer
Chaewon Lee from DAEIL SYSTEMS
Tuning Date
September 3, 2024
Installation Date
July 2, 2024
Installation Site
Semiconductor Convergence Research Building B1, Kyungpook National University
End User
Kyungpook National University
Equipment Information
Manufacturer: JEOL
Equipment: Electron Beam Lithography
Model: JBX-8100FS
Equipment Vibration Specifications
Equipment Status
설치완료/가동중
Tuning Session
2nd session
Measuring Equipment
Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200
Lines: 3200
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units: m/s
Conclusion
Vibration measurement shows very large floor vibration near 30 Hz in the Vertical, Left to Right, and Front to Back directions.
In the Vertical, Left to Right, and Front to Back directions, equipment vibration meets the specification across all frequency bands.
Measurement Data
| Measuring Point | Status | Direction | Spec | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-P2200 | Floor | DVIA-P2200 | ||||
| Location: Semiconductor Convergence Research Building 1. Bottom pad 2. DVIA-P2200 | 설치완료 /가동중 | Vertical | 3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz | 2.09E-06 m/s @ 1 Hz | 1.21E-06 m/s @ 1 Hz | VC-E | VC-F |
| 5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz | 2.60E-06 m/s @ 2.5 Hz | 9.35E-07 m/s @ 2.5 Hz | VC-E | VC-F | |||
| 3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz | 2.17E-06 m/s @ 5 Hz | 1.21E-06 m/s @ 5 Hz | VC-E | VC-F | |||
| 6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz | 1.77E-06 m/s @ 10 Hz | 1.60E-06 m/s @ 10 Hz | VC-E | VC-E | |||
| 2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz | 2.74E-06 m/s @ 12.5 Hz | 4.37E-07 m/s @ 12.5 Hz | VC-E | VC-G | |||
| 2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz | 9.13E-06 m/s @ 16 Hz | 6.24E-07 m/s @ 16 Hz | VC-C | VC-G | |||
| 1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz | 2.99E-05 m/s @ 31.5 Hz | 8.35E-06 m/s @ 31.5 Hz | VC-A | VC-C | |||
| Left to Right | 3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz | 9.80E-07 m/s @ 1.6 Hz | 5.47E-06 m/s @ 1.6 Hz | VC-F | VC-G | ||
| 5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz | 1.11E-06 m/s @ 2.5 Hz | 4.19E-07 m/s @ 2.5 Hz | VC-F | VC-G | |||
| 3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz | 1.10E-06 m/s @ 8 Hz | 1.60E-07 m/s @ 8 Hz | VC-F | VC-G | |||
| 6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz | 1.27E-06 m/s @ 10 Hz | 1.66E-07 m/s @ 10 Hz | VC-F | VC-G | |||
| 2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz | 2.14E-06 m/s @ 12.5 Hz | 2.75E-07 m/s @ 12.5 Hz | VC-E | VC-G | |||
| 2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz | 8.72E-06 m/s @ 16 Hz | 1.08E-06 m/s @ 16 Hz | VC-C | VC-F | |||
| 1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz | 4.50E-05 m/s @ 31.5 Hz | 1.36E-05 m/s @ 31.5 Hz | VC-A | VC-B | |||
| Front to Back | 3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz | 1.18E-06 m/s @ 1 Hz | 1.55E-06 m/s @ 1 Hz | VC-F | VC-F | ||
| 5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz | 1.07E-06 m/s @ 2 Hz | 4.90E-07 m/s @ 2 Hz | VC-F | VC-G | |||
| 3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz | 1.37E-06 m/s @ 8 Hz | 5.37E-07 m/s @ 8 Hz | VC-F | VC-G | |||
| 6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz | 1.77E-06 m/s @ 10 Hz | 3.08E-07 m/s @ 10 Hz | VC-E | VC-G | |||
| 2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz | 2.68E-06 m/s @ 12.5 Hz | 8.37E-07 m/s @ 12.5 Hz | VC-E | VC-F | |||
| 2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz | 6.74E-06 m/s @ 16 Hz | 5.33E-06 m/s @ 16 Hz | VC-C | VC-D | |||
| 1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz | 2.13E-04 m/s @ 31.5 Hz | 2.34E-05 m/s @ 31.5 Hz | OFFICE | VC-B | |||
Data and Image
Vertical VC Curves
Vertical Narrowband
Vertical Transmissibility
Left to Right VC Curves
Left to Right Narrowband
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Narrowband
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
