TESCAN Solaris X FIB-SEM DVIA-ML1000 Installation Report
Vibration Isolation System Info
Model: DVIA-ML1000
Serial Number: 240403R2
Engineer
Chaewon Lee
Tuning Date
August 09, 2024
Report written date
August 19, 2024
Installation Site
Tier-1 Semiconductor Future FIB Analyzing Lab
Equipment
Manufacturer: TESCAN
Equipment: FIB-SEM
Model: Solaris X
Equipment Status
The microscope was installed on the DVIA-ML1000 platform.
Number of Tuning Trial
1st
Measurement Device
8.1) Brüel & Kjær LAN-XI DAQ Type 3050
-Hardware: B&K Front End Type 3050-A-040
-Software: B&K Pulse Labshop 22 Version
8.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Setup
Bandwidth: 200 Hz
Lines: 800
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: Max
Vibration Specification
<10 um/s below 30 Hz, <20 um/s above 30 Hz
Conclusion
After the installation of the DVIA-ML1000, floor vibration was reduced to within the vibration specification in all axes.
Measurement Summary
| Measurement Point | Status | Axis | Vibration Specification | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-ML1000 | Floor | DVIA-ML1000 | ||||
| FIB LAB 1. Floor 2. DVIA-ML1000 | Microscope is installed and is in operation. | Vertical | 10 um/s @ 1 - 30 Hz | 1.22E-05 m/s @ 2.5 Hz | 1.23E-06 m/s @ 2.5 Hz | ✗ FAIL | ✓ PASS |
| 20 um/s @ 30 - 100 Hz | 1.76E-05 m/s @ 31.5 Hz | 1.33E-06 m/s @ 31.5 Hz | ✓ PASS | ✓ PASS | |||
| Left to Right | 10 um/s @ 1 - 30 Hz | 1.27E-05 m/s @ 1.25 Hz | 1.34E-06 m/s @ 1.25 Hz | ✗ FAIL | ✓ PASS | ||
| 20 um/s @ 30 - 100 Hz | 2.24E-06 m/s @ 63 Hz | 3.74E-07 m/s @ 63 Hz | ✓ PASS | ✓ PASS | |||
| Front to Back | 10 um/s @ 1 - 30 Hz | 8.40E-06 m/s @ 1.25 Hz | 5.60E-07 m/s @ 1.25 Hz | ✓ PASS | ✓ PASS | ||
| 20 um/s @ 30 - 100 Hz | 1.76E-06 m/s @ 63 Hz | 1.28E-07 m/s @ 63 Hz | ✓ PASS | ✓ PASS | |||
Data and Image
Vertical VC Curves
Vertical Narrow Band
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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