Vibration Isolation Case Studies

DVIA-STONE-300 handout (serial 240413R3-1) titled STONE-300_ 240413R3-1 Set up with setup 24.11.05 and reporting 24.11.06. Target equipment is Thermo Fisher Spectra 300 S/TEM. The Overview line, measurement metadata, and equipment lines follow the report verbatim; the worksheet publishes only STONE-300 internal program screenshots for Vertical, Left to Right, and Front to Back. The decorative raster after the title block is omitted from the public page. The source has no standalone vibration-specification section, measurement summary table, or Reference section.

DVIA-ML1000 installation report — ZEISS FE-SEM GeminiSEM 560 (serial 240925R4) at a Tier-1 fab DSR laboratory. Overview and bus-related measurement context per the report. Equipment Status: Equipment installed and IDLE. Vibration specification as published screenshot; measurement setup text; Tuning Request N/A; conclusions for Active, Passive, and isolator-off states; three measurement-summary tables; VC / Autospectrum / Transmissibility plots for Active and Passive, and VC / Autospectrum for Turned off where the report omits transmissibility curves. Generic Reference vibration criteria as a markdown table (embedded reference figure omitted).

Follow-up DVIA-U850 vibration service report (serial from source filename 230724R1) documenting October 2024 measurements at Tier-1 Semiconductor Cheonan-area line: fan/cable remediation, VC-curve plotting, settling-time runs (Align/PBI/BLT), transmissibility, and comparative prior Suwon relocation context. Decorative cover/header artwork omitted; generic VC criterion handout under Reference is reproduced as markdown only.

DVIA-P2200 (serial 240705R1) installation report for JEOL JBX-8100FS electron beam lithography at Korea Institute of Nanotechnology 2F Nano Reso/Pattern Support Line. Tuning and vibration measurement on October 29, 2024; engineer Chaewon Lee (DAEIL SYSTEMS). Published figures: equipment photo, equipment vibration specification diagram, vertical/left-to-right/front-to-back VC, narrowband, and transmissibility (Data Physics Software), plus control-unit VC and narrowband plots. Reference uses the Generic Vibration Criteria markdown table only.

DVIA-ML1000 installation report (serial 240709R2) for ZEISS FE-SEM GeminiSEM 460 at Tier-1 Semiconductor Cheonan campus C5 building. Korean handout: tuning and vibration measurement on October 24, 2024; report written October 29, 2024. Equipment condition: 장비 설치 및 IDLE. Brüel & Kjær LAN-XI DAQ and PCB 393B05 accelerometer. Manufacturer equipment vibration specification as embedded figure; UI-program VC, Autospectrum, and Transmissibility by axis; onsite equipment photo; Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).

DVIA-M1000 serial 240724R3 — handout for Suzhou Institute of Nanotechnology, target equipment Omicron STM, installation and measurement in Suzhou. Overview and measurement details match the published form; M1000 internal program performance plots labeled Vertical, Left to Right, and Front to Back from the UI program. Cover-only header graphics are not republished.