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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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1246 case studies
Westlake University Thermo Fisher Helios 5 Hydra DVIA-M1000 (230908R3-2) Installation Report — 2024.09.19

DVIA-M1000 serial 230908R3-2 — Westlake University, Thermo Fisher Scientific Helios 5 Hydra in Hangzhou (杭州市). Handout covers set-up on 2024.09.19 with internal-program performance plots for Vertical, Left to Right, and Front to Back; equipment and site photograph under the Set-up block (decorative title-page logos omitted when absent).

Huahong ASML eScan 460 DVIA-P4000 Installation Report
Installation Report
DVIA-P Series
09-19-2024

Huahong ASML eScan 460 DVIA-P4000 Installation Report

DVIA-P4000 installation report (serial 240424R1) at Huahong for an ASML E-beam wafer inspection system (eScan 460). Engineer Chaewon Lee; tuning September 12, 2024; report written September 19, 2024. Vibration specification VC-D. Published vertical, left-to-right, and front-to-back VC curves, narrow-band, and transmissibility plots. Word cover banner (image1) and Reference criteria raster (image11) omitted; Reference uses the standard Generic Vibration Criteria markdown table.

Shanghai Electric Guoxuan Thermo Fisher Apreo 2S HiVac DVIA-M1000 (230804R5) Set Up Report

DVIA-M1000 set-up report (serial 230804R5 in report title) for Thermo Fisher FE-SEM Apreo 2S HiVac at Shanghai Electric Guoxuan New Energy, Shanghai. Overview matches the issued form. Published plots: three M1000 internal-program performance screens under Vertical, Left to Right, and Front to Back — the source DOCX uses the same embedded image for Left to Right and Front to Back, so the same public URL is repeated for those two headings. Decorative facility/title-block image under the cover title is omitted from the public page.

Henan Academy of Sciences ThermoFisher Helios FIB-SEM DVIA-M1000 (240216R1) Installation Report

DVIA-M1000 installation report (serial 240216R1) for ThermoFisher Helios FIB-SEM at Henan Academy of Sciences, Zhengzhou, China. Overview states the platform is appropriately installed and functioning as intended. Prepared for Henan Academy of Sciences; end user Henan Academy of Science per the form. Equipment condition: The equipment is installed/Turned off. Chaewon Lee, first tuning trial on September 10, 2024; report written June 23, 2025. The published handout has no separate vibration specification section or measurement summary table. Tuning Request UI capture; vertical, left-to-right, and front-to-back transmissibility under Data and Image; Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).

Welling Motor Thermo Fisher Scios 2 Hivac FIB-SEM DVIA-M1000 (240325R2) Installation Report

DVIA-M1000 installation report (serial 240325R2) for Welling Motor in Foshan, China. Overview states the platform is appropriately installed and functioning as intended. Thermo Fisher FIB-SEM Scios 2 Hivac; equipment condition per report: The equipment is installed/ Turn off. Chaewon Lee, tuning date August 28, 2024; report written September 10, 2024. The published report includes Tuning Request UI capture, vertical / left-to-right / front-to-back transmissibility plots, and an on-site equipment photo. The source form does not include End User or Vibration specification sections. Reference uses the standard VC criterion markdown table only (no Generic Vibration Criteria figure).

YIMO Southern University of Science and Technology HITACHI Regulus8230 SEM DVIA-M1000 (240401R1-3) Installation Report

DVIA-M1000 installation report (serial 240401R1-3) prepared for Southern University of Science and Technology in Shenzhen, China, via YIMO. Overview states the platform is appropriately installed and functioning as intended. HITACHI Regulus8230 SEM; equipment condition The equipment is installed. UI-program transmissibility (vertical, left-to-right, front-to-back). The published case omits the decorative header graphic and the Reference VC diagram image; Reference uses the standard Generic Vibration Criteria markdown table.