LLS DVIA-T45 (240228R2) Inspection Report

DVIA-T Series

Inspection Report

LLS

DVIA-T45

240228R2

Vibration Isolation System Info

Model: DVIA-T45

Serial Number: 240228R2

Engineer

Chaewon Lee

Tuning Date

2024-11-01

Equipment Status

The interferometer is installed on the DVIA-T45.

Number of Tuning Trial

1st

Conclusion

We tuned and diagnosed the DVIA-T remotely.

All sensors respond properly, and the vibration isolation performance meets the standards.

The reason for image shaking may be related to the installation environment. The general corrective action would be replacing the table on which DVIA-T is installed with a table with higher rigidity.

Data & Image

1) Sensor check

Vertical Sensor1

Vertical Sensor 2

Left to Right Sensor

Front to Back Sensor

2) Transmissibility

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A