Tier-1 Semiconductor DSR Park Systems NX10 DVIA-T45 (240624R3) Installation Report
Contents
Customer
Tier-1 Semiconductor DSR
Prepared by
Engineer: Chaewon Lee
Tuning date: 24.07.11
Report written date: 24.07.15
Overview
DVIA-T45 was installed and vibration measurements performed at Tier-1 Semiconductor DSR Building A underground research tower B1.
Comparative vibration measurement was conducted against the KAKO active isolator (KURASHIKI)
already installed at the site.
Vertical floor vibration was measured for about 25 minutes.
Vibration Isolation Platform
Model: DVIA-T45
Serial number: 240624R3
Engineer
Chaewon Lee from DAEIL SYSTEMS, field engineer
Tuning Date
July 11, 2024
Installation Site
Tier-1 Semiconductor DSR Building A underground research tower B1
Customer Equipment
Manufacturer: Park Systems
Equipment: AFM
Model: NX10
Equipment Status
장비 제진대위에 안착 및 턴온(turned on).
Number of tuning sessions
1
Measuring Equipment
10.1) Data Physics
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Vibration Measurement Setup
F Span: 200
Lines: 3200
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units: m/s
Conclusion
1) DAEIL SYSTEMS DVIA-T45
Across Left to Right and Front to Back axes, damping reaches VC-G in all evaluated bands.
Vertical: except in the 10–12.5 Hz range, damping reaches VC-G in all other evaluated bands.
2) KURASHIKI KAKO
Vertical and Left to Right: amplification occurs across 1–1.6 Hz.
Front to Back: amplification occurs across 1–2.5 Hz.
3) DAEIL SYSTEMS DVIA-T45 vs KURASHIKI KAKO isolator comparison
The KAKO isolator shows amplification below roughly 1.5 Hz in all directions.
DAEIL SYSTEMS DVIA-T45 does not show that behavior and achieves isolation performance from
1 Hz onward as summarized in the tables.
4) Floor vibration measurement
Vertical only. At 10 Hz the measured vibration exceeds VC-A.
Measurement Summary
```text
1)대일시스템 DVIA-T45
| 측정 장소 | 장비상태 | 방향 | 측정 데이터 | 측정 결과 | |||
|---|---|---|---|---|---|---|---|
| 석정반 | (Floor) | DVIA-T45 | 석정반 | (Floor) | DVIA-T45 | ||
| 위치: A동 연구타워 지하 1층 | 1. 석정반 | 2. DVIA-T45 | 설치완료 | Vertical | 1.98E-06 m/s | @ 2 Hz | 4.39E-07 m/s |
| 5.08E-05 m/s | @ 10 Hz | 1.98E-06 m/s | @ 10 Hz | Operating Theatre | VC-E | ||
| 3.40E-06 m/s | @ 31.5 Hz | 3.88E-07 m/s | @ 31.5 Hz | VC-D | VC-G | ||
| Left to Right | 1.91E-06 m/s | @ 2 Hz | 6.88E-07 m/s | @ 2 Hz | VC-E | VC-G | |
| 1.24E-05 m/s | @ 8 Hz | 6.27E-07 m/s | @ 8 Hz | VC-C | VC-G | ||
| 3.13E-06 m/s | @ 20 Hz | 1.09E-07 m/s | @ 20 Hz | VC-D | VC-G | ||
| Front to Back | 1.10E-06 m/s | @ 1 Hz | 6.84E-07 m/s | @ 1 Hz | VC-F | VC-G | |
| 6.35E-05 m/s | @ 10 Hz | 6.63E-07 m/s | @ 10 Hz | Operating Theatre | VC-G | ||
| 1.06E-06 m/s | @ 50 Hz | 5.03E-06 m/s | @ 50 Hz | VC-F | VC-G | ||
2) KURASHIKI KAKO 제진대
| 측정 장소 | 장비상태 | 방향 | 측정 데이터 | 측정 결과 | |||
|---|---|---|---|---|---|---|---|
| 석정반 | (Floor) | KAKO | 석정반 | (Floor) | KAKO | ||
| 위치: A동 연구타워 지하 1층 | 1. 석정반 | 2. KAKO | 설치완료 | Vertical | 4.86E-07 m/s | @ 1.25 Hz | 8.47E-07 m/s |
| 2.15E-05 m/s | @ 12.5 Hz | 3.94E-07 m/s | @ 12.5 Hz | VC-B | VC-G | ||
| 1.19E-05 m/s | @ 16 Hz | 2.89E-07 m/s | @ 16 Hz | VC-C | VC-G | ||
| Left to Right | 8.33E-07 m/s | @ 1 Hz | 1.65E-06 m/s | @ 1 Hz | VC-F | VC-E | |
| 1.26E-05 m/s | @ 10 Hz | 1.25E-07 m/s | @ 10 Hz | VC-B | VC-G | ||
| 3.23E-06 m/s | @ 12.5 Hz | 7.17E-08 m/s | @ 12.5 Hz | VC-D | VC-G | ||
| Front to Back | 1.27E-06 m/s | @ 1 Hz | 2.22E-06 m/s | @ 1 Hz | VC-F | VC-E | |
| 4.46E-05 m/s | @ 10 Hz | 7.08E-07 m/s | @ 10 Hz | VC-A | VC-G | ||
| 2.20E-05 m/s | @ 12.5 Hz | 4.27E-08 m/s | @ 12.5 Hz | VC-B | VC-G | ||
3) 대일시스템 DVIA-T45, KUROSHIKI KAKO 제진대 비교
| 측정 장소 | 장비상태 | 방향 | 측정 결과 | ||
|---|---|---|---|---|---|
| KURASHIKI | KAKO | DAEIL SYSTEMS | DVIA-T45 | ||
| 위치: A동 연구타워 지하 1층 | 1. KAKO | 2. DVIA-T45 | 설치완료 | Vertical | 104%(증폭) |
| 126%(증폭) | @ 1.3125 Hz | 19% | @ 2 Hz | ||
| Left to Right | 146%(증폭) | @ 1.25 Hz | 55% | @ 1.25 Hz | |
| 120%(증폭) | @ 1.5 Hz | 45% | @ 1.5 Hz | ||
| Front to Back | 123%(증폭) | @ 1.125 Hz | 32% | @ 1.125 Hz | |
| 182%(증폭) | @ 1.375 Hz | 23% | @ 1.375 Hz | ||
4) Vertical Floor 진동
| 측정 장소 | 장비상태 | 방향 | 측정 결과 | ||
|---|---|---|---|---|---|
| 석정반 | (Floor) | 석정반 | (Floor) | ||
| 위치: A동 연구타워 지하 1층 | 1. DVIA-T45 | 설치완료 | Vertical | 1.83E-06 m/s | @ 2 Hz |
| 5.52E-05 m/s | @ 10 Hz | Operating Theatre | |||
| 8.96E-06 m/s | @ 31.5 Hz | VC-C | |||
```
Data and Image
1) DAEIL SYSTEMS DVIA-T45
Vertical VC Curves
Vertical Narrow Band
Vertical Transmissibility
Left to Right VC Curves
Left to Right Narrow Band
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Narrow Band
Front to Back Transmissibility
2) KURASHIKI KAKO
Vertical VC Curves
Vertical Narrow Band
Vertical Transmissibility
Left to Right VC Curves
Left to Right Narrow Band
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Narrow Band
Front to Back Transmissibility
3) Daeil DVIA-T45, KUROSHIKI KAKO 제진대 비교
Vertical Transmissibility
Left to Right Transmissibility
Front to Back Transmissibility
Vertical Narrow Band
Left to Right Narrow Band
Front to Back Narrow Band
4) Floor vibration (25 min measurement)
Vertical VC Curves
Vertical Narrow Band
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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