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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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441 case studies
Ziess-Gemini 2 DVIA-MB1000 (P172) Internal program performance — 2020.07.29

DVIA-MB1000 worksheet P172 for Ziess-Gemini 2 (measurement date 2020.07.23; setup and reporting 2020.07.29; operator HyoungMun Choi, Daeil System). Worksheet header in the DOCX reads MB1000_200522R8-8 Set up. Setup text and summary tables follow the worksheet as published; internal-program plots are ordered Z, X, then Y axis. The decorative raster on the centred title line is not republished.

MB1000 P144 (190801R7) worksheet — setup and reporting 2020-07-23

Ingested from DOCX “MB1000_P144 20.07.23.docx”. MB1000 platform 190801R7 title block; operator Choi, HyoungMun; setup and reporting both 2020-07-23; measurement the same Thursday with Daeil System. Target equipment, installation site, end user, place of measurement, and equipment model fields are blank in the handout (published as N/A). Summary-of-results table lists Floor / Above Active vs Z–X–Y without numeric cells in the source Word table; prose states good omnidirectional performance. MB1000 internal-program Z/X/Y screenshots follow DOCX §2a (rId9–11 → image2–4); raster under “NO PICTURE” (rId8 / image1) is not republished.

天工爱和特钢有限公司 ZEISS EVO MA25 DVIA-MB1000 (191211R2 · P158) Remote measurement — Internal program plots — 2020.07.20

Remote worksheet for DVIA-MB1000 serial 191211R2 (project P158 from the source workbook name) with ZEISS EVO MA25. END USER and installation site 天工爱和特钢有限公司. Operator Kim Doohyun (Daeil Systems); setup, measurement, and reporting on 2020-07-20. Published figures are MB1000 internal-program Z / X / Y axis screenshots in Word order (DOCX §2a). The VC-Class summary table in the handout has blank data cells as filed. The first raster under the centred “MB1000_191211R2 Set up” line is omitted as a worksheet title graphic.

ZEISS FEI Crossbeam 550 DVIA-MB1000 P176 Internal Program Performance — Tier-1 Semiconductor — 2020.07.17

MB1000 internal-program handout for P176 with ZEISS FEI Crossbeam 550 at a Tier-1 Semiconductor fab (Icheon): setup and report dated 2020-07-16/17, measurement 2020-07-17 by Manager Choi, Hyoung Mun (DAEIL SYSTEMS). Publishes DAQ setup photos, VC-Class summary table, Z/X/Y internal-program screenshots, and octave-band plots (BASE: Floor, TOP: Above Active). Decorative title-block raster (DOCX image1) and Generic Vibration Criteria table/chart rasters (image5–6) are omitted in favor of the standard markdown VC reference table.

ZEISS FE SEM DVIA-MB1000 P178 Internal Program Performance — Tier-1 Semiconductor — 2020.07.17

MB1000 internal-program handout for P178 with ZEISS FE SEM at a Tier-1 Semiconductor fab (Icheon): setup and report dated 2020-07-16/17, measurement 2020-07-17 by Manager Choi, Hyoung Mun (DAEIL SYSTEMS). Publishes DAQ setup photos, VC-Class summary table, Z/X/Y internal-program screenshots, and octave-band plots (BASE: Floor, TOP: Above Active). Decorative title-block raster (DOCX image1) and Generic Vibration Criteria table/chart rasters (image5–6) are omitted in favor of the standard markdown VC reference table.

FEI NOVA450 DVIA-MB1000 (MB1000 P8) installation worksheet — Seoul Hanyang University — 2020-07-14

MB1000 program P8 handout after active mounting at Hanyang University Fusion Technology Center (2nd floor) for FEI NOVA450: site photograph, LAN-XI and PCB reference images, LabShop screenshot, PASS/F-style VC-Class summary across floor versus above active vibration isolation, MB1000 internal-program Z/X/Y plots, octave-band spectra (Floor vs Above Active). Generic VC table and VC curve snapshots from Word are folded into the markdown Reference.