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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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455 case studies
Thermo Fisher Scientific Apreo ChemiSEM S HiVac DVIA-ML1000 Installation Report

DVIA-ML1000 (serial 260716R4) installation report for a Thermo Fisher Scientific Apreo ChemiSEM S HiVac at the Aeolus Tyres site in Jiaozuo. Tuning and vibration measurement were performed on 2026.10.29 with the equipment in the Idle state. The floor exceeds the VC-F specification in the Vertical and Front to Back axes, while the isolator meets VC-F in all three axes.

HEM6000 SEM DVIA-MB1000 (S/N 250514R3) Installation Report
Installation Report
DVIA-M Series
10-27-2026

HEM6000 SEM DVIA-MB1000 (S/N 250514R3) Installation Report

Installation report for the DVIA-MB1000 (S/N 250514R3) supporting a CIQTEK HEM6000 SEM at Westlake University in Hangzhou. After installation at the Hangzhou site, tuning and vibration measurement were performed with the equipment in the IDLE state. On the floor the Vertical and Front to Back axes exceeded the specification (FAIL), while on the DVIA-MB1000 all three axes met the allowable limits (PASS). Per-axis autospectrum and the installation photo are published.

ZEISS FE-SEM DVIA-ML1000 Installation Report
Installation Report
DVIA-M Series
10-22-2026

ZEISS FE-SEM DVIA-ML1000 Installation Report

DVIA-ML1000 (serial 260617R5) installation report for a ZEISS FE-SEM Sigma 360 at the PipeChina site in Tianjin. Tuning (1st trial) was performed on 2026.10.22 with the equipment in the Idle state; floor vibration exceeded the ZEISS specification in all three axes while the isolator met the specification in all three axes.

JEOL JSM-IT300 SEM DVIA-ML1000 Installation Report
Installation Report
DVIA-M Series
10-16-2026

JEOL JSM-IT300 SEM DVIA-ML1000 Installation Report

DVIA-ML1000 installation report (serial 260825R5) for a JEOL JSM-IT300 SEM at Jiangyin, supplied for end user Jiangyin Xingcheng Special Steel Works Co., Ltd. Tuning and vibration measurement were performed on 2026.10.16 with the equipment in the IDLE state, and all axes at the floor and on the isolation system passed the 2 µm pk-pk vibration specification.

TESCAN MIRA LMS FE-SEM DVIA-ML1000 Installation Report
Installation Report
DVIA-M Series
10-15-2026

TESCAN MIRA LMS FE-SEM DVIA-ML1000 Installation Report

DVIA-ML1000 installation report (serial 260730R5) for a TESCAN MIRA LMS FE-SEM at Wuhan University of Science and Technology in Wuhan. Tuning and vibration measurement were performed on 2026.10.15 with the SEM in the Idle state; after the first tuning trial the isolator meets the vibration specification on all three axes.

AIPIN STM DVIA-ML1000 Re-Tuning Installation Report
Installation Report
DVIA-M Series
10-13-2026

AIPIN STM DVIA-ML1000 Re-Tuning Installation Report

DVIA-ML1000 re-tuning installation report (serial 221024R3) for an Aipin Instrument Technology AIPIN STM at the National Center for Nanoscience and Technology in Beijing. The 5th tuning trial (re-tuning) was performed on 2026.10.13 in response to isolator instability reported by the customer. With the AIPIN STM in the IDLE state, the isolator reached VC-G (Vertical) and VC-E (Left to Right, Front to Back), and floor vibration was attenuated on all axes except the 12–16 Hz band on the horizontal axes; as no vibration specification was available from the manufacturer or the end user, no PASS/FAIL determination is made.