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Installation Report
DVIA-M Series
08-28-2020

Beijing Software Testing DVIA-MB1000 Thermo Scientific Scios 2 Remote measurement — Internal program Z/X/Y plots (SN 191211R4 · P154) — 2020.08.28

DVIA-M Series
Installation Report
DVIA-MB1000
191211R4
Thermo Scientific
Scios 2
Beijing
YIMO
National Application Software Testing Labs
SEM
DVIA-ML1000

Contents

(MB1000_191211R4(P154) Set up)

Target equipmentThermo scientific scios2
Place of installationBeijing Software Testing & QA Center
RemarkGood Performance
END USERNational Application Software Testing Labs
Operator: Munho NohDate of business trip : 17.12.27~17.12.29
Date of setup : 20.08.28Date of reporting : 20.08.28

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date: 20.08.28 (FRI),

Operator: Daeil System, Research engineer Munho Noh

Place of measurement : Beijing Software Testing & QA Center

Equipment Model: Thermo scientific scios2

Measurement conditions and results

Summary of measurement results

Test Condition

Transmissibility

2 Hz5 Hz10 Hz
Z-21.00dB-23.20 dB-26.07dB
X-24.49 dB-27.62 dB-30.39 dB
Y-27.18 dB-36.58 dB-22.84 dB

Good omnidirectional performance.

MB1000 internal program performance measurement result

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date08-28-2020
Tags
DVIA-M Series
Installation Report
DVIA-MB1000
191211R4
Thermo Scientific
Scios 2
Beijing
YIMO
National Application Software Testing Labs
SEM
DVIA-ML1000

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