Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Seoul National University DVIA-T56 (130123R3) Installation Report
DVIA-T56 (serial 130123R3) tuning and vibration measurement at Samsung Leaders Building Room 1104 — level foot rework, equipment-not-installed condition; VC curves, autospectrum, and transmissibility by axis.
LLS DVIA-T45 (240228R2) Inspection Report
Remote tuning and diagnosis of DVIA-T45 (serial 240228R2) for LLS with interferometer installed — November 2024. Publishes sensor checks and axis transmissibility plots; Reference uses the Generic Vibration Criteria markdown table only.
Tier-1 Semiconductor DSR Park Systems NX10 DVIA-T45 (240624R3) Installation Report
DVIA-T45 (serial 240624R3) tuning and vibration measurement versus KAKO/KURASHIKI at Tier-1 Semiconductor DSR with Park Systems AFM NX10: VC/Narrow-band/Transmissibility comparison plots and 25‑minute vertical floor data. Measurement July 2024; written July 2024.
LG Chem METTLER TOLEDO XPR205 DeltaRange DVIA-T67 (240306R1) Installation Report
DVIA-T67(DEMO) demo installation at LG Science Park E8 for METTLER TOLEDO XPR205 DeltaRange — UI program tuning, transmissibility plots, and VC curve measurement — March 2024.
MIT Menlo Sub-Hz Optical Reference DVIA-T45 (211206R5-4) Inspection Report
DVIA-T45 inspection at MIT Room 26-340 for the Menlo sub-Hz linewidth optical reference system: remote RS-232 cable compatibility, bracket removal, Common Potentiometer float-height adjustment, and Z/X/Y transmissibility verification to −20 dB to −25 dB at 5 Hz and 10 Hz.
TOPTICA DVIA-T45 Installation Report — Field inspection (sensor fault)
September 2023 DVIA-T45 field inspection for TOPTICA: performance check requested due to faulty operation; Z2 and Z base sensor faults observed during sensor checks (UI screenshots and transmissibility).