Installation Report

DVIA-T Series

12-12-2024

Seoul National University DVIA-T56 (130123R3) Installation Report

DVIA-T Series

Installation Report

Seoul National University

AFM

DVIA-T56

130123R3

Overview

Tuning and vibration measurement were performed on the DVIA-T56 installed at Samsung Leaders Building Room 1104.

A problem occurred where vibration control did not work when equipment was operating inside the glove box.

To resolve this, level foot tap holes were re-machined and existing level feet were replaced with non-plated level feet.

Tuning and vibration measurement were performed with equipment not installed.

As customer-developed equipment, the vibration spec is undetermined.

Data are presented as VC curves together with reference materials on vibration levels.

Isolator

Model: DVIA-T56

Serial Number: 130123R3

Engineer

DAEIL SYSTEMS field engineers Chaewon Lee, Jonghwa Seo

Measurement Date

December 12, 2024

Installation Site

Samsung Leaders Building Room 1104

End User

Seoul National University

Customer Equipment

Manufacturer: Self - made

Equipment: AFM

Model: -

Equipment Status

Equipment not installed

Vibration Measurement Equipment

9.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

9.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Prepared by

Engineer: Chaewon Lee, Jonghwa Seo

Tuning date: 24.12.12

Report written date: 24.12.12

Conclusion

Vertical: VC-G vibration is measured in all frequency bands.

Left to Right, Front to Back: VC-G vibration is measured in all frequency bands except 1 Hz.

Measurement Data

Measurement Site	State	Direction	Floor	DVIA-T56
Samsung Leaders Building Room 1104 1. Floor 2. DVIA-T56	Equipment not installed	Vertical	VC-C @ 12.5 Hz	VC-G @ 12.5 Hz
		Left to Right	VC-C @ 8 Hz	VC-G @ 8 Hz
		Front to Back	Operating Theatre @ 12.5 Hz	VC-G @ 12.5 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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