Vibration Isolation Case Studies

DVIA-M3000 (241213R1) installation report at Vertilite (Changzhou, China) for a Raith E-beam lithography system: tuning request capture, vertical/left-to-right/front-to-back transmissibility plots, equipment photo, and generic vibration criteria as a markdown table.

DVIA-ML3000 (240423R5) installation report at the Institute of Geodesy and Geophysics, Beijing — Thermo Fisher TEM Sprectra 300. Report documents axis transmissibility plots and equipment photography; standard reference vibration criteria are provided as a markdown table.

DVIA-ML3000 installation report (serial 250225R3) for ZEISS X-ray Microscope Versa 630 at Tier-1 Semiconductor Cheonan Campus C5. June 2, 2025 tuning and vibration measurement; report written June 9, 2025. Equipment condition 장비 Turned on/IDLE. Manufacturer vibration limits via specification capture; VC / Autospectrum / Transmissibility plots by axis. Distinct conclusion notes X-ray image quality before and after isolator tuning. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).

DVIA-MB1000 installation report (serial 231128R4) at the Tier-1 Semiconductor Yongin campus: Zeiss FE-SEM Gemini 2; VC / narrow-band / transmissibility plots by axis; equipment photo; Reference as the standard Generic Vibration Criteria markdown table.

DVIA-MB1000 (serial 170619R2) tuning and vibration measurements for a SERON Technology self-developed FE-SEM at World Vision room 506, with the equipment in Operation after mounting on the platform. The workbook notes a rotary pump running at the rear of the equipment during the session. Publishes VC curves, narrow-band, and transmissibility plots for vertical, left-to-right, and front-to-back axes, an on-site installation photograph, and the standard VC reference as a markdown table (no separate criteria figure).

DVIA-ML3000 (250103R2-1) installation report at POSTECH — Raith Voyager electron-beam lithography. Equipment specification diagram, VC / Autospectrum / Transmissibility by axis, equipment photo, and standard Reference vibration criteria as a markdown table.