Vibration Isolation Case Studies

DVIA-ML3000 installation report (serial 241021R4) at Fudan University for the JEOL STEM ARM200 in Shanghai. Tuning date March 4, 2025. Equipment condition documented as installed and turned off. The handout publishes a tuning-request capture plus vertical, left-to-right, and front-to-back transmissibility plots from the measurement UI, one on-site equipment photo, and Reference as the standard VC criteria markdown table (the reference figure is not republished).

DVIA-ML3000 active vibration isolation installation and vibration measurement summary for the Raith Voyager electron beam lithography system at POSTECH, including floor vs platform results and VC / autospectrum / transmissibility plots.

DVIA-ML1000S installation report (serial 241008R1).

DVIA-ML1000 installation report (serial 240919R8) for Hitachi SEM SU7000 at Tier-1 Semiconductor Cheonan campus (M15 4M laboratory). Field engineer Chaewon Lee; measurement January 3, 2025; report written January 8, 2025. Equipment condition (form): 장비 설치 및 Turned off. Measurement table status: 장비 설치/ Turned off. Equipment specification text: Horizontal: VC-G, Vertical: VC-F. Nine program plots under Data and Image (VC, Autospectrum, Transmissibility per axis). Reference uses the standard Generic Vibration Criteria markdown table only (embedded reference graphic not republished). Decorative header strip omitted from the public page.

DVIA-ML1000 installation report (serial 240710R2) for ZEISS FIB-SEM Crossbeam 550 at Tier-1 Semiconductor Cheonan C5. Overview describes on-site tuning and vibration measurement with the tool in IDLE after placement; measurement setup and equipment vibration limit VC-E appear in the specification capture. Measurement Summary includes a vertical floor line FAIL with platform PASS; horizontal axes PASS. Published plots: vibration specification capture, VC / Autospectrum / Transmissibility by axis. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).

DVIA-MB3000 (serial 241011R1) on-site tuning and vibration worksheet at Tier-1 Display Manufacturer Giheung. Measurement curves and UI plots are not published on this page owing to customer site data-handling restrictions; the written findings, measurement summary table, and the equipment vibration specification diagram from the installation report are provided. DAEIL SYSTEMS field engineer Chae-won Lee; report written 2024.11.29.