Installation Report

DVIA-M Series

01-08-2025

Tier-1 Semiconductor Hitachi SEM SU7000 DVIA-ML1000 (240919R8) Installation Report

DVIA-M Series

Installation Report

Tier-1 Semiconductor

Hitachi

SEM

SU7000

DVIA-ML1000

240919R8

Overview

Tuning and vibration measurement were conducted for the DVIA-ML1000 installed at Tier-1 Semiconductor Cheonan Campus 4, M4-floor research laboratory.

Tuning and vibration measurement were conducted with the equipment installed and in a Turned off state.

After plotting Data as VC Curves, Reference materials are provided for the vibration levels.

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 240919R8

Engineer

Daeil Systems field engineer Chaewon Lee (이채원)

Tuning Date

January 3, 2025

Report written date

January 8, 2025

End User

Tier-1 Semiconductor

Number of Tuning Trial

N/A

Location

Tier-1 Semiconductor Cheonan Campus 4, M15 4M research laboratory

Equipment

Manufacturer: Hitachi

Equipment: SEM

Model: SU7000

Equipment specification

Horizontal: VC-G, Vertical: VC-F

Equipment Condition

장비 설치 및 Turned off

Measurement Device

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

모든 방향에서 진동 스펙을 만족합니다.

Measurement Summary

Place of measurement	Status	Direction	Floor	DVIA-ML1000
Tier-1 Semiconductor Cheonan Campus 4, M15 4M research laboratory 1. Floor 2. DVIA-ML1000	장비 설치/ Turned off	Vertical	VC-A @ 12.5 Hz	VC-G @ 12.5 Hz
		Left to Right	VC-D @ 4 Hz	VC-G @ 4 Hz
		Front to Back	VC-D @ 4 Hz	VC-G @ 4 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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