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Installation Report
DVIA-M Series
03-26-2026

Hitachi SEM SU8230 DVIA-M1000 (250421R6) Installation Report

DVIA-M Series
Installation Report
Hitachi
SEM
SU8230
DVIA-M1000
DVIA-ML1000

Contents

Overview

The DVIA-ML1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Info

Model: DVIA-ML1000

Serial Number: 250421R6

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

March 24, 2026

Report written date

March 26, 2026

End User

N/A

Number of Tuning Trial

1st

Location

N/A

Equipment

Manufacturer: Hitachi

Equipment: SEM

Model: SU8230

Vibration specification

Vertical: VC-F, Horizontal: VC-G

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

N/A

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date03-26-2026
Tags
DVIA-M Series
Installation Report
Hitachi
SEM
SU8230
DVIA-M1000
DVIA-ML1000

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