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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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1246 case studies
Sigma300 Shenzhen DVIA-M1000 Installation Report (UNITED BLUEOCEAN, SN 220509R2, 2023-01-10)

UNITED BLUEOCEAN — Sigma300 target tool on DVIA-M1000 (SN 220509R2), installation and measurement in SHENZHEN. VC-class summary table plus MB1000 internal program plots and octave-band results.

Sungkyunkwan University JEOL JBX-8100FX DVIA-P2200 (220509R3) Installation Report

DVIA-P2200 (serial 220509R3) installation at Sungkyunkwan University Research Building for JEOL JBX-8100FX electron beam lithography. Engineers Hosang Yu and Youngha Lee; tuning January 9, 2023; report written January 12, 2023. Overview states the platform is appropriately installed and functioning as intended. Summary VC grades (floor vs active) and Z/X/Y VC curves from the installation handout.

Avaryholding HUAIAN Olympus Dsx 1000 DVIA-UD350-0910M (220603R2) Installation Report

DVIA-UD350-0910M-50t-800H (S/N 220603R2) compact installation worksheet at Avaryholding (HUAIAN) with Olympus Dsx 1000: site checklist, operator and trip dates, Overview with on-site measurement metadata (2023.01.04), and UD350 internal-program Z / X / Y axis screenshots. Decorative Word header bitmap (image1) and Pause Mode UI popup (image4) omitted; no Reference section in the source.

Sigma300 DVIA-M1000 Installation Report (Dongguan, 220607R1, 2022)

Short-field report — DVIA-M1000 220607R1 with Sigma300 at Dongguan: site tables, set-up photograph, and MB1000 internal-program Z / X / Y performance captures (measurement dated 2022.12.23).

ShanghaiTech University DVIA-M1000 (220628R2) Setup Report
Installation Report
DVIA-M Series
12-28-2022

ShanghaiTech University DVIA-M1000 (220628R2) Setup Report

DVIA-M1000 / MB1000 field handout (SN 220628R2) at ShanghaiTech University — cover summary, installation site photo, and MB1000 internal program Z / X / Y performance captures. No separate vibration-spec, measurement-summary, or reference sections on this form.

Shanghai Shumin Xi’an Interferometer DVIA-MO1000 (220707R7) Installation Report — December 27, 2022

DVIA-MO1000 installation report (serial 220707R7) prepared for Shanghai Shumin Equipment Co., Ltd. Tuning December 9, 2022 in Xi’an with Z-, X-, and Y-axis transmissibility plots.