Installation Report
DVIA-M Series
02-15-2023
LyondellBasell ZEISS EVO10 DVIA-M1000 (221221R2) Installation Report
DVIA-M Series
Installation Report
LyondellBasell
ZEISS
EVO10
DVIA-M1000
221221R2
Suzhou
Contents
(M1000_ 221221R2 Set up)
Site checklist
| Target equipment | Zeiss EVO10 |
|---|---|
| Place of installation | SUZHOU |
| Remark | Good Performance |
| END USER | Lyondellbasell |
Operator and dates
Operator: Lee, Young Ha
Date of setup: 23.02.15
Date of reporting: 23.02.17
Date of business trip : 17.12.27~17.12.29
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date: 2023.02.15 (Wednesday),
Operator: DAEIL SYSTEMS, Youngha Lee
Place of measurement: SUZHOU
Equipment Model: Zeiss EVO10
5.
MB1000 internal program performance measurement result
Z axis
X axis
Y axis
Share this Case Study
Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date02-15-2023
Tags
DVIA-M Series
Installation Report
LyondellBasell
ZEISS
EVO10
DVIA-M1000
221221R2
Suzhou
Related Case Studies
DVIA-M Series
Suzhou Tongguan Microelectronics ZEISS SEM Sigma360 DVIA-M1000 (231204R4) Internal Program Performance — 2024.09.05
09-05-2024Read more
DVIA-M Series
YIMO Zeiss Technology (Suzhou) ZEISS EVO 10 SEM DVIA-M1000 (240304R8) Installation Report
11-11-2025Read more
DVIA-M Series
PXW ZEISS FIB-SEM Crossbeam550 DVIA-M1000 (230222R4) Installation Report
05-15-2026Read more