Vibration Isolation Case Studies

LG Innotek (End User LG Innotek, 2F cleanroom of Gumi Plant 4) NanoSystem precision measurement equipment (white-light interferometer) DVIA-ULF1000 demonstration (demo test) report — after installation, tuning and vibration measurement were performed in the IDLE state and represented in VC Curve format. The platform achieved VC-F (Vertical), VC-E (Left to Right), and VC-D (Front to Back), confirming excellent vibration isolation performance. Per-axis autospectra and VC Curves, and installation photos are published.

DVIA-P2200 installation report for a high vacuum chamber at the Korea Institute of Machinery & Materials (KIMM), Building L2 1F laboratory — tuning and vibration measurement performed with the equipment Turned off. No vibration specification was defined, and the measured floor/platform levels are reported as VC Curves on all axes.

Tuning and vibration measurement of the DVIA-P1000 installed for the EL High Vacuum Chamber in the 1st floor laboratory of Building L2 at Korea Institute of Machinery & Materials (KIMM). After reconnecting the air pipes as independent lines, excellent vibration isolation performance was confirmed on all axes in the Turn-off state.

DVIA-ULF700 installation report (serial 260827R1) for a ZEISS EVO 10 SEM at End User Hebei Hengke Vibration Damping Equipment Co., Ltd. in Hebei. Tuning was carried out on 2026.09.14 and vibration was measured with the equipment in the IDLE state at two points, the installation floor and the top surface of the DVIA-ULF700. All three axes (Vertical, Left to Right, Front to Back) passed the specified vibration criterion at both measurement points, the floor and the DVIA-ULF700. Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and one installation photo.

DVIA-ULF700 installation report (serial 260528R9) for a ZEISS FE-SEM Sigma360 at End User School of Life and Health Sciences, Hainan Normal University in Haikou. Tuning was carried out on 2026.09.11 and vibration was measured with the equipment in the IDLE state at two points, the installation floor and the top surface of the DVIA-ULF700. All three axes (Vertical, Left to Right, Front to Back) passed the specified vibration criterion at both measurement points, the floor and the DVIA-ULF700.

DVIA-ML1000 installation report (serial 260622R4) for a TESCAN FIB-SEM SOLARIS X2 GMH installed at ASE Korea PB1, 1CMD QO Lab, Electron Microscopy Room. Tuning was carried out on 2026.09.11 and vibration was measured with the equipment in the IDLE state. All three axes met the reference specification and achieved a PASS rating, with the vertical axis improving from VC-B to VC-E, the left-to-right axis from VC-E to VC-G, and the front-to-back axis from VC-B to VC-F.