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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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455 case studies
Omicron STM DVIA-MB1000 (230905R3) MB1000 Internal Program Performance — 2024.01.23 Measurement

MB1000 handout DVIA-MB1000 serial 230905R3; target equipment Omicron STM with setup 24.01.23 and reporting 24.07.05. Measurements summarized as M1000 internal program screenshots for Z, X, and Y axes. Word-embedded decorative header raster (media preceding body headings) omitted from publication; Reference publishes the Generic Vibration Criteria markdown table only.

Tier-1 Semiconductor ZEISS Xradia 620 Versa DVIA-MB3000 (231005R2) Installation Report — 2023.12.27

DVIA-MB3000 (serial 231005R2) installation report dated 27 December 2023 at Tier-1 Semiconductor with ZEISS Xradia 620 Versa X-ray Microscope: Summary of vibration results table (Floor vs Active VC curve grades across axis bands), VC curves for Floor and Active states per axis, and Reference diagrams with explanatory notes comparing VC curves and Modified Mercalli intensity. Engineer Jongwon Park (DAEIL SYSTEMS); tuning date and report written date 23.12.27.

Ohio State University Nanotech West Lab Raith EPBG 5150 DVIA-MB3000 VEC (221130R3) Installation Report — 2023.11.30

DVIA-MB3000 (serial 221130R3, platform DVIA-MB3000 - 1800 x 1300 mm) VEC installation worksheet at Ohio State University Nanotech West Lab with Raith EPBG 5150. Form tuning date 23.11.30; UI program transmissibility (Z/X/Y) and VEC plots including floor/active VC, floor/active vibration, high-frequency transmissibility, and repeat-axis transmissibility curves per the worksheet; Reference as a markdown Generic Vibration Criteria table (no separate criterion figure). Engineer Youngha Lee (DAEIL SYSTEMS); report written date on form 23.12.19.

POSCO FUTURE M GeminiSEM 560 DVIA-MB1000 (230704R3) Installation Report

DVIA-MB1000 installation report (serial 230704R3) for GeminiSEM 560 at POSCO FUTURE M 음극재 site. Summary-of-vibration table lists VC-class cells for Floor versus Active across Z/X/Y curves; embedded plots are floor and active VC curves per axis plus an equipment photograph. Decorative header/logo raster beneath the Word address block is omitted from publication. Reference follows the repo standard Generic Vibration Criteria markdown table (embedded reference raster not republished). The second Y-axis figure follows the Floor plot in Word but was captioned incorrectly twice as Floor; publication labels it Active VC curves to align with Z/X structure.

TUSUR, Tomsk Emcraft Veritas 3100 DVIA-MB1000 Installation Report — 2023.10.27

DVIA-MB1000 (SN 220825R6-3) under Emcraft Veritas 3100 for TUSUR, Tomsk, Russia — engineer itinerary, onsite tuning window, Z/X/Y transmissibility plots (no standalone equipment photograph in source).

Huawei Solaris GMH DVIA-M1000 Installation Report (230509R6-2)
Installation Report
DVIA-M Series
11-01-2023

Huawei Solaris GMH DVIA-M1000 Installation Report (230509R6-2)

Huawei-end Solaris GMH site (Shanghai): DVIA-M1000 serial 230509R6-2 setup — internal program performance screenshots for Z, X, and Y axes.