Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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ZEISS EVO 10 SEM DVIA-U1000 Installation Report (2nd Tuning)
DVIA-U1000 active vibration isolation platform (serial 241217R6) supporting a ZEISS EVO 10 SEM at End User Shanghai Fasteners and Welding Materials Technology Research Institute Co., Ltd. (上海紧焊所) in Shanghai, China, reported. This is the 2nd tuning trial on the same unit: the platform was retuned on 2026.08.04 and vibration was measured with the equipment in the Turned off state. Published figures are the Chinese-language tuning request work order (调试请求书), the per-axis transmissibility traces captured from the DAEIL UI program for Vertical (Z), Left to Right (X) and Front to Back (Y), and an installation photo of the EVO 10 seated on the DVIA-U Series platform. The source report contains no vibration specification section and no pass/fail measurement summary table, so none is shown here.

ZEISS Sigma 360 FE-SEM DVIA-ULFB700 Installation Report
DVIA-ULFB700 installation report (serial 260203R2) for a ZEISS Sigma 360 FE-SEM at End User Hubei University of Technology in Wuhan, China. Tuning on 2026.08.04 covered air pressure setting and per-axis control gain adjustment; vibration was then measured with the equipment Turned off, and both the floor and the DVIA-ULFB700 platform met the ZEISS vibration specification on all three axes (Vertical, Left to Right, Front to Back). Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and an installation photo of the installed Sigma 360.

Sensofar Sneox Optical Profilometer DVIA-ULFD350 Installation Report
Sensofar Sneox optical profilometer DVIA-ULFD350 installation report — after installation at Suzhou for end user Heihe Electronics Co., Ltd., the DVIA-ULFD350 active vibration isolation platform was tuned and measured with the equipment in the IDLE state. The floor measured VC-E vertically and VC-F left-to-right and front-to-back, while on the DVIA-ULFD350 platform all three axes reached VC-G. The tuning request work-order form, per-axis Autospectrum and VC Curves plots, and the installation photo are published.

Thermo Fisher Helios 5CX FIB-SEM DVIA-ULF1000 Installation Report
(End User Citic Metal, Beijing, China) Thermo Fisher Scientific FIB-SEM Helios 5CX DVIA-ULF1000 installation report — after installation, tuning and vibration measurement were performed with the equipment in the IDLE state and represented in VC Curve format against the VC-F specification. On the DVIA-ULF1000 platform all three axes (Vertical, Left-to-Right, Front-to-Back) passed; on the floor all three axes failed. The tuning request capture, per-axis VC Curves, and an installation photo are published.

Korea Institute of Science and Technology TESCAN Clara FE-SEM DVIA-ULFB700 Installation Report
Korea Institute of Science and Technology (Building L0, Room 184) TESCAN Clara FE-SEM DVIA-ULFB700 installation report — a revisit inspection prompted by upper-door open/close noise. The noise was traced to the spring contacting the top-plate groove with no impact on performance, and all X/Y/Z axes met the required vibration specification. Per-axis Autospectrum and VC curves are published.

J&L Tech Residual Stress Measurement System DVIA-ULF1500 Installation Report
J&L Tech (development lab, Ansan branch) residual stress measurement system DVIA-ULF1500 installation report. After installation, tuning and vibration measurement were performed with the equipment installed and Turned On. On the floor all three axes measured at the VC-C level, while on the DVIA-ULF1500 platform the vertical (Z) axis reached VC-G and the left-to-right (X) and front-to-back (Y) axes reached VC-E. Per-axis Autospectrum and VC Curves plus the installation photo are published.