Vibration Isolation Case Studies

UB700 P8 field worksheet at Shanghai Institute of Technical Physics (SITP), 1F; operator Choi Sung Won; business trip 18.12.19 and report written 18.12.26. Posts VC-Class Base/Top summary for ACTIVE (Z/X/Y), MB1000 internal-program Z/X/Y plots, and vibration-environment measurement Z/X/Y plots. Decorative Word header and set-up banner images (image1, image2) omitted.

Compact remote-tuning worksheet for DVIA-UD350 serial 210929R1 (P26) with OLIMPUS target equipment. Setup 2021-12-15, reporting 2021-12-17, business trip 2017-12-27~29; overview measurement dated 21.12.15(WEN) by Daeil Systems (YU, HoSang). Place of installation and End User are blank in the source (published as N/A). Transmissibility summary at 2 / 5 / 10 Hz and UD350 internal-program Z / X / Y screenshots are published; centered cover banner (image1) omitted as decorative.

DVIA-UB700 (S/N 220811R2, 910×1140×143H) installation report prepared for TechnoPark(Ulsan) with ZEISS SEM EVO10; engineer Seounghoon Cheon. Tuning date 22.11.01 and report written date 22.11.03 per worksheet. Summary VC-class table (Floor vs Active) and nine Data and Image plots measured with equipment turned off—floor/top VC curves and transmissibility for Z/X/Y; decorative header bitmap (image1) and Reference VC diagram (image11) omitted in favor of the published markdown criteria table.

DVIA-UB700 (S/N 221024R4, 910×1140×139H mm) installation report for ZEISS SEM Sigma 300 at Hanyang University, Seoul — tuned 2022-12-15 by Seounghoon Cheon (DAEIL SYSTEMS), reported 2022-12-19. Measurement with Data Physics Quattro / SignalCalc ACE; FFT 0–80 Hz, Hanning / 800 lines. VC summary (equipment off): Floor vs Active across Z/X/Y bands as in the Summary of Vibration Results table. Publishes equipment-off Floor / Top VC and Transmissibility plots (nine figures). Decorative cover header bitmap omitted; ISO/VC reference chart replaced with markdown table.

DVIA-ULF700 (serial 250708R1-1) tuning and vibration measurement at a Tier-1 Semiconductor 2F clean booth with self-made customer equipment (equipment model field "-"). Measurement on November 4, 2025; report written November 4, 2025 on the cover block. Equipment Turned on/IDLE with a rotary pump operating on the platform top. Publishes Data Physics DAQ and UI Program measurement summary tables plus paired VC, autospectrum, and transmissibility plots for three axes. Reference VC criteria as a markdown table only.

DVIA-ULF1500 (serial 260223R2) tuning and vibration measurement at a Tier-1 Semiconductor DSR C Tower 3F research laboratory for ZEISS Xradia Versa 730 X-ray Microscope (equipment spec VC-C). Measurement on 2026-05-07 with equipment 장비 설치 및 Turned off; report written 2026-05-14. Nine-axis VC / autospectrum / transmissibility plots with PASS/FAIL measurement summary vs VC-C spec. Reference VC criteria as markdown table only.