Installation Report

DVIA-ULF Series

07-01-2026

J&L Tech Residual Stress Measurement System DVIA-ULF1500 Installation Report

DVIA-ULF Series

Installation Report

J&L Tech

SPsystems

Residual Stress Measurement System

DVIA-ULF1500

260403R1

Ansan

Overview

Tuning and vibration measurement were performed after installing the DVIA-ULF1500 in the development lab of the J&L Tech Ansan branch.

Inspection and vibration measurement were performed with the equipment installed and Turned On.

The data is presented in VC Curve format, together with reference material on the corresponding vibration levels.

Vibration Isolation System Information

Model: DVIA-ULF1500

Serial Number: 260403R1

Engineer

Gyumin Park · DAEIL SYSTEMS

Tuning Date

2026.07.01

Installation Site

Development lab, J&L Tech Ansan branch

End User

Customer: J&L Tech

Equipment

Manufacturer: (National R&D Project) SPsystems & J&L Tech

Equipment: Residual Stress Measurement System

Model: N/A

Vibration Specification

N/A

Equipment Condition

Equipment installed and Turned On

Measurement Equipment

10.1) Measurement Equipment

Hardware: B&K Front End Type 3040-A-040

Software: B&K Pulse Labshop22 Version

10.2) Accelerometer

PCB 393B05

Measurement Setup

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Conclusion

Following installation of the DVIA-ULF1500 and the vibration measurement, stable vibration isolation performance data was obtained on all X, Y and Z axes even under the stage-movement condition of the equipment on top of the platform.

Measurement Summary

Measurement Point	Vibration Specification	Axis	Floor	DVIA-ULF1500
1. Floor 2. DVIA-ULF1500	N/A	Vertical (Z-axis)	VC-C	VC-G
		Left to Right (X-axis)	VC-C	VC-E
		Front to Back (Y-axis)	VC-C	VC-E

Data and Image

Z-axis Autospectrum

Z-axis VC Curves

X-axis Autospectrum

X-axis VC Curves

Y-axis Autospectrum

Y-axis VC Curves

Installation Photo

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude (μm/s) (μin/s)	Detail Size (μm)
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	< 0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.

The information in this table is provided for reference. In most cases it is advisable to seek the advice of a specialist familiar with the application and the vibration requirements of the equipment and process.