Installation Report

DVIA-ULF Series

12-22-2025

J&L Tech DVIA-ULF1500 Installation Report — 250904R1

DVIA-ULF Series

Installation Report

DVIA-ULF1500

250904R1

J&L Tech

Ansan

Customer

J&L Tech

Author

Engineer: 박동규

Measurement date (header)

25.12.18

Report written date

25.12.22

Overview

Tuning and vibration measurement were performed for the ULF-1500 installed at the J&L Tech Ansan branch development lab.

With SP Systems Jabius E equipment on the platform, monitor vibration was observed during monitoring; passive tuning and gain adjustment were performed.

With the equipment installed, tuning and vibration measurement were performed in the 장비 설치 및 Turned on/IDLE state.

Data are presented as VC curves; reference materials on vibration levels are provided.

Vibration isolation platform

Model: ULF-1500

Serial number: 250904R1

Engineer

대일시스템 개발팀 박동규

Tuning / measurement date (field)

2025년 12월 18일

Installation location

J&L Tech 안산지사 개발실

End User

J&L Tech

Customer equipment

Manufacturer: 에스피시스템즈

Equipment: 자비스E

Model: -

Equipment specification

Equipment status

장비 설치 및 Turned on/IDLE

Vibration measurement equipment

10.1) Brüel & Kjær LAN-XI DAQ Type 3050 DAQ

-Hardware: B&K Front End Type 3050-B-040

-Software: B&K Pulse Labshop 14 Version

10.2) Accelerometer

BRUEL&KJAER Accelerometer

Model: Type 8340

Vibration measurement setup

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

On all axes, tabletop vibration was reduced relative to floor vibration.

The on-screen shimmering issue improved after gain tuning and passive adjustment, confirmed jointly with the customer.

Measurement data

13.1) 측정데이터 1

Measurement site	State	Direction	Floor vibration	DVIA-ULF1500
J&L Tech 안산지사 개발실 1. 바닥진동 2. DVIA-ULF1500	Turned on/IDLE	Vertical	VC-A @ 63 Hz	VC-E @ 90 Hz
		Left to Right	VC-C @ 4 Hz	VC-D @ 1 Hz
		Front to Back	VC-B @ 63 Hz	VC-D @ 6 Hz

Data and Image

14.1) 측정 데이터1

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A