Vibration Isolation Case Studies

DVIA-ML3000 installation report at Jeonbuk National University with Raith Voyager electron beam lithography. Published graphics include vibration specification capture, VC/autospectrum/transmissibility plots per axis, and equipment photo.

DVIA-ML3000 installation report (serial 250225R2) for ZEISS X-ray Microscope Xradia 630 Versa at Tier-1 Semiconductor Cheongju 3 Campus M11. March 31, 2025 tuning and vibration measurement; report written April 1, 2025. Equipment condition 장비 Turned on/IDLE. Manufacturer vibration limits via specification capture; VC / Autospectrum / Transmissibility plots by axis. Conclusion notes all axes meet specification and attributes somewhat lower measured high-frequency performance to internal motor-related vibration influences. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).

DVIA-ML1000 installation report (serial 241107R5).

DVIA-ML1000 installation report (serial 241223R3).

DVIA-MB3000 active vibration isolation worksheet (serial 241017R1) for a JEOL F200 TEM at Fudan University, with measurements in Shanghai. Setup and reporting 2025.03.04; operators Chaewon Lee and Jonghwa Suh (DAEIL SYSTEMS). Published figures are MB3000 internal-program captures for Vertical, Left to Right, and Front to Back only; the Word raster under the *(MB3000_ 241017R1 Set up)* title block is omitted on the public page. No Reference / VC appendix is present in the source handout.

DVIA-MB3000 (serial 241021R4) setup worksheet at Fudan University with JEOL STEM ARM200 in Shanghai: operator and reporting dates 25.03.04, measurement date 2025.03.04 (Tuesday). Includes MB3000 internal program performance plots for vertical, left-to-right, and front-to-back directions.