Tier-1 Semiconductor DSR ZEISS Versa 630 X-ray Microscope DVIA-ML3000 (250625R2) Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-ML3000 installed at Tier-1 Semiconductor DSR A Tower 5F analysis laboratory.
With 장비 Turned on/IDLE, tuning and vibration measurement were conducted.
Data are presented as VC curves with reference information on vibration levels.
Vibration Isolation System Information
Model: DVIA-ML3000
Serial Number: 250625R2
Engineer
Chaewon Lee — DAEIL SYSTEMS
Tuning Date
August 6, 2025
Report Written Date
August 18, 2025
Installation Site
Tier-1 Semiconductor DSR A Tower 5F analysis laboratory
End User
Tier-1 Semiconductor
Equipment Condition
장비 Turned on/IDLE
Equipment
Manufacturer: ZEISS
Equipment: X-ray Microscope
Model: Versa 630
Measuring Equipment
9.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
9.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Setup
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Equipment Vibration Specification
Conclusion
The vibration specification is satisfied in all directions.
Measurement Data
| Measurement site | Status | Specification | Axis | Measurement data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-ML3000 | Floor | DVIA-ML3000 | ||||
| Tier-1 Semiconductor DSR A Tower 5F analysis laboratory 1. Floor vibration 2. DVIA-ML3000 | 장비 Turned on/IDLE | VC-C | Vertical | VC-C @ 63 Hz | VC-G @ 63 Hz | ✓ PASS | ✓ PASS |
| Left to Right | VC-D @ 63 Hz | VC-G @ 63 Hz | ✓ PASS | ✓ PASS | |||
| Front to Back | VC-C @ 25 Hz | VC-E @ 25 Hz | ✓ PASS | ✓ PASS | |||
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Generic Vibration Criteria
*Notes:*
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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