Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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All Case Studies

Wuxi Guangzi (Wuxi) ZEISS GeminiSEM 560 DVIA-MB1000 (231214R7-1) Installation Report
MB1000 handout (filename MB1000_231214R7-1, report line MB1000_ 231214R7-1 Set-up) for Wuxi Guangzi end user in Wuxi; ZEISS GeminiSEM 560; setup 23.12.14 / reporting 24.06.05; measurement dated 2024.05.21. Published screenshots only for Vertical, Left to Right, and Front to Back under the M1000 internal program caption — cover/header raster under Set-up omitted.

Shanghai Opotong Thermo Scientific Axia SEM DVIA-ULFB700 Installation Report
DVIA-ULFB700 (S/N 260202R1-5) installation report for Thermo Fisher Scientific SEM (Axia) at Shanghai Opotong Instruments Co., Ltd. Includes vibration-specification note graphic, VC / Autospectrum / Transmissibility plots from the UI program, equipment photo, and Reference as a VC criteria markdown table (no separate reference bitmap).

YIMOTECH Thermo Fisher Axia SEM DVIA-ULFB700 Installation Report
DVIA-ULFB700 installation report (serial 260202R1-5) for a Thermo Fisher Scientific Axia SEM at End User Shanghai Opotong Instruments Co., Ltd. in Shanghai, China. Measured with the equipment turned on/IDLE, the floor read VC-B vertically, VC-E left-to-right and VC-D front-to-back, while the DVIA-ULFB700 platform reached VC-F, VC-G and VC-G on the same axes. Published figures: the vibration specification page from the equipment pre-installation manual, per-axis VC Curves, Autospectrum and Transmissibility captured from the UI program, and an equipment photo.

Shanghai Opotong Instruments COXEM EM 40 DVIA-T56 (260202R1-6) Re-Tuning Report
DVIA-T56 re-tuning report (reference 260202R1-6) for a COXEM Tabletop SEM EM 40 at Shanghai Opotong Instruments Co., Ltd., Shanghai, China. Overview documents re-tuning due to active vibration oscillation. Vibration Specification shows N/A with the engineer explanatory note verbatim; tuning trial and tuning request match the report. Equipment condition wording is unchanged from the report. Measurement summary compares floor versus DVIA-T56 with equipment turned on. Measurement Data Obtained via UI Program publishes VC curves, Autospectrum, and Transmissibility for vertical, left-to-right, and front-to-back axes. Includes the equipment photograph from the reference report. Reference uses the standard Generic Vibration Criteria markdown table only (Word Reference EMF omitted). Decorative header imagery before the title block is omitted from the public page.

ASM ZEISS GeminiSEM 560 DVIA-ULF1000 (260415R5) Installation Report
DVIA-ULF1000 (S/N 260415R5) tuning and vibration measurement at ASM Hwaseong Plant Building 1, 4F laboratory for a ZEISS FE-SEM GeminiSEM 560; tuning on May 11, 2026; report dated May 14, 2026. Equipment turned on/IDLE; measurement summary with floor and platform RMS per the report; vertical, left-to-right, and front-to-back VC curves, autospectra, and transmissibility; on-site installation photo. Decorative banner and reference EMF graphic omitted — Reference uses the standard VC markdown table.

YIMO Thermo Fisher Scientific Helios SEM DVIA-ULF1000 Installation Report
Installation report for Thermo Fisher Scientific SEM (Helios model) on DVIA-ULF1000 (S/N 260320R1) at Beijing for Citic Metal via YIMO; tuning 13 May 2026. Prepared for and End User both list Citic Metal—the public page omits a duplicate Prepared for block. Vibration specification is UI capture only; Measurement Summary uses the report’s eight-column RMS and PASS/FAIL layout. Publishes VC curves, Autospectrum, and Transmissibility for vertical, left-to-right, and front-to-back axes plus equipment photo; Reference is the standard Generic Vibration Criteria markdown table only (Word EMF omitted). Decorative header logo strip before the title block is not published.