Vibration Isolation Case Studies

DVIA-ML1000 installation report (serial 260725R2) for an attocube attoDRY1000/SU closed-cycle cryostat at Quantum Photonics Research Laboratory in Copenhagen, Denmark. Tuning was carried out on 2026.09.22, and vibration on the isolator top plate was verified against the customer VC-E requirement on all axes.

DVIA-ML1000 installation report (serial 260617R6-1) for a ZEISS Sigma 360 FE-SEM system in Hangzhou, supplied for end user Zhejiang A&F University. Tuning was performed on 2026.09.11 with the equipment turned off, and all axes at the floor and on the isolation system passed the VC-E vibration specification.

DVIA-ML1000 installation report (serial 260622R4) for a TESCAN FIB-SEM SOLARIS X2 GMH installed at ASE Korea PB1, 1CMD QO Lab, Electron Microscopy Room. Tuning was carried out on 2026.09.11 and vibration was measured with the equipment in the IDLE state. All three axes met the reference specification and achieved a PASS rating, with the vertical axis improving from VC-B to VC-E, the left-to-right axis from VC-E to VC-G, and the front-to-back axis from VC-B to VC-F.

DVIA-ML1000 installation report (serial 260521R5) for a SEMILAB AFM-2100 AFM system in Budapest. Tuning was performed on 2026.09.10 with the equipment turned off; vertical and horizontal measurements at the floor and on the isolation system were evaluated against the VC-E vibration specification.

ZEISS Sigma 360 FE-SEM DVIA-ML1000 installation report — the DVIA-ML1000 active vibration isolation platform was installed at Guangzhou for end user Resonac Electronic Materials, then re-tuned (2nd trial) and measured with the equipment Turned off. Against the Sigma 360 horizontal and vertical allowable vibration specification (mm/s² RMS, 1–100 Hz), the bare floor exceeded the limit on the vertical and front-to-back axes, while the DVIA-ML1000 platform passed on all three axes. The tuning request work order, the allowable vibration tables and the per-axis Autospectrum plots are published; no installation photographs were permitted at the site.

DVIA-ML1000 installation report (serial 260422R1-1) for a RAITH Voyager E-Beam system in Suzhou, supplied for end user Dingxin Optoelectronics Technology. Tuning was performed on 2026.08.27 with the equipment idle; the Vertical and Front-to-Back axes met the vibration specification while the Left-to-Right axis remained out of compliance due to a resonance near 9 Hz.