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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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1246 case studies
Universa DVIA-T56 (200428R5) Installation Report
Installation Report
DVIA-T Series
07-15-2022

Universa DVIA-T56 (200428R5) Installation Report

DVIA-T56 installation report (serial 200428R5) for Universa. Overview states the isolation platform operates as intended, notes noise on impact attributed to X2 VCM movement, describes customer-requested X2 VCM function disabled, and cites possible unstable screw fastening. Location and Equipment read “Requesting information from customer”. Data section publishes vertical and front-to-back transmissibility plots plus two X2 VCM turn-off photographs tied to the X-axis subsection.

Zeiss Gemini SEM360 DVIA-ML1000 Installation Report (220307R1)
Installation Report
DVIA-M Series
07-12-2022

Zeiss Gemini SEM360 DVIA-ML1000 Installation Report (220307R1)

Zeiss Gemini SEM360 on DVIA-M1000 (220307R1) in Shanghai — VC-class floor vs active summary and MB1000 program VC / octave-band plots.

ZEISS EVO15 DVIA-M1000 Internal Program Performance Report — LENS (Taizhou, 2022)

LENS (蓝思精密) field worksheet (serial 220427R2): Z/X/Y-axis MB1000 internal-program screenshots (transmissibility and coherence); setup summary tabulates 2 Hz transmissibility/attenuation. DOCX administrative signature graphic (image1) omitted from publication.

Youngwoo DSP Cheonan Testbed DVIA-MO1000 (211012R12-1) Installation Report — June 27, 2022

DVIA-MO1000 (serial 211012R12-1) worksheet for 영우 DSP, Testbed Cleanroom tuning on 2022-06-23 in Cheonan with axis-wise VC curves and transmissibility. Summary table uses VC curve grades G/F per site floor vs Active platform bands.

Youngwoo DSP Cheonan Testbed DVIA-MO1000 (211012R12-1) Korean MO1000 Handout Installation Report — June 27, 2022

Korean MO1000 worksheet for DVIA-MO1000 serial 211012R12-1 at 영우 DSP Testbed Cleanroom (Cheonan). Same June 23, 2022 tuning and June 27, 2022 report date as the English worksheet variant; summary table uses VC grades G/F for floor vs active platform. Publishes six axis VC curve and transmissibility plots from the handout. Decorative header raster before Overview and the Word Reference graphic are omitted; VC reference is the standard markdown table only.

Zeiss EVO18 DVIA-M1000 (211208R4) Installation Report — Lingyuan Steel, Wuhan

DVIA-M1000 worksheet (serial 211208R4, source M1000_211208R4_22.06.24.docx) for Lingyuan Iron and Steel Group with Zeiss EVO18 target equipment installed in Wuhan, China (END USER as issued). Covers operator/setup/reporting dates, Overview with measurement metadata (2022.06.24), VC-Class Floor vs Above Active summary, MB1000 internal-program Z/X/Y plots, and Octave Band Result Z/X/Y plots. Decorative company-line and setup-line header graphics omitted from the public page.