ZEISS SIGMA500 (Qingdao) DVIA-ML1000 Installation Report (SN 220308R4, Aug 2022)

DVIA-M Series

Installation Report

ZEISS

SIGMA500

Qingdao

DVIA-ML1000

220308R4

Target equipment

ZEISS SIGMA500

QINGDAO

Good Performance

青岛蓝谷微纳

Cheon, Seoung hoon

22.08.01

22.08.03

17.12.27~17.12.29

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date: 2022.08.01 (Monday),

Operator: DAEIL SYSTEMS, Seounghoon Cheon, Youngha Lee

Place of measurement: QINGDAO

Equipment Model: ZEISS SIGMA500

Test Condition VC-Class	Z	X	Y
Floor	E	F	F
Above Active	G	F	F

Good omnidirectional performance.

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A