Vibration Isolation Case Studies

YIMOTECH ZEISS Sigma 360 FE-SEM DVIA-ML1000 installation report — the DVIA-ML1000 active vibration isolation platform was installed at Guangzhou for end user Resonac Electronic Materials, then re-tuned (2nd trial) and measured with the equipment Turned off. Against the Sigma 360 horizontal and vertical allowable vibration specification (mm/s² RMS, 1–100 Hz), the bare floor exceeded the limit on the vertical and front-to-back axes, while the DVIA-ML1000 platform passed on all three axes. The tuning request work order, the allowable vibration tables and the per-axis Autospectrum plots are published; no installation photographs were permitted at the site.

Installation report and demo test for the DVIA-T78 (serial 260819S1) installed in the 1F laboratory of the P&T4 building at a Tier-1 Semiconductor Icheon campus, under an OLYMPUS MX63L microscope. The microscope had no formally defined allowable vibration specification, but image resolution degraded and visible shaking appeared during operation, and the passive isolation table in use was not enough. Two demo tests on the DVIA-T78 and two baseline measurements on the passive table were taken with a B&K Front End Type 3040-A-040 and a PCB 393B05 accelerometer in the IDLE state. On the active platform all three axes settled to the VC-D to VC-E range, and the microscope image shaking and noise disappeared completely. All 24 per-axis Autospectrum and VC Curves plots are published together with the IEST-RP-CC012.2 vibration criteria reference.

YIMO TECH Hitachi High-Tech SU7000 SEM DVIA-ML1000 installation report — the DVIA-ML1000 active vibration isolation platform was installed at Fuzhou for end user Fujian University of Technology, then tuned and measured with the equipment in the IDLE state. Against the SU7000 horizontal and vertical allowable vibration specification (µm pk-pk, 1–10 Hz), the floor and the DVIA-ML1000 platform both passed on the vertical, left-to-right, and front-to-back axes. The tuning request work order, the allowable vibration tables, the per-axis Autospectrum plots and the installation photo are published.

Installation report for the DVIA-ULFB700 vibration isolation platform (S/N 260707R4) supporting an Attocube AttoDRY 2100 cryostat in Room L02, Building 2 of the Electronics and Telecommunications Research Institute (ETRI). Tuning and vibration measurement were performed with the equipment in the IDLE state against a 3.125 µm/s RMS (VC-E) requirement in both the horizontal and vertical directions. On the floor all three axes failed the requirement, while on the isolated DVIA-ULFB700 platform all three axes passed: after the first round of tuning the vertical axis reached VC-F and the horizontal axes reached VC-E. Per-axis VC Curves for the Z, X and Y axes are published.

DVIA-ULF700 installation report (serial 260511R3) for a ZEISS Sigma 360 FE-SEM at End User Jiechuang Trading in Shanghai, China. Tuning was carried out on 2026.08.20 and vibration was measured with the equipment in the Idle state at two points, the installation floor and the top surface of the DVIA-ULF700. The floor failed the vertical criterion while both horizontal axes passed; on the DVIA-ULF700 all three axes (Vertical, Left to Right, Front to Back) satisfied the ZEISS specification, confirming that the isolator fully attenuates the vertical exceedance present in the site. Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and two installation photos.

DVIA-ML1000 installation report (serial 260610R5) for a Thermo Fisher Scientific Quattro ESEM delivered through YIMOTECH to End User Suzhou National Laboratory in Suzhou, China. Tuning was carried out on 2026.08.19 and vibration was measured with the equipment in the Turned off state, against a horizontal criterion of VC-G and a vertical criterion of VC-F. In the published VC Curve plots the floor (base) trace rises above the SPEC line on all three axes, while the trace measured on top of the DVIA-ML1000 stays below it across the whole 1–100 Hz band, showing that the platform brings the ambient environment of the laboratory down to the required VC class. Published figures: the tuning request work order, the per-axis VC Curve plots captured from the UI program, and the installation photo of the Quattro ESEM on the DVIA-ML1000.