Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Fuyang University of Technology Thermo Fisher Apreo 2C SEM DVIA-ML1000 Installation Report
Thermo Fisher Scientific Apreo 2C SEM at Fuyang University of Technology in Fuyang, China, delivered through channel — DVIA-ML1000 installation report for the 1st tuning trial, tuned and written up on June 22, 2026. The measurement summary classifies both the floor and the DVIA-ML1000 platform as VC-G on the vertical, left to right and front to back axes. Because Thermo Fisher Scientific issues site-specific ambient vibration requirements from its own SE-Tools site survey, the applicable specification follows that survey report. The tuning request work order, the per-axis Autospectrum, VC Curves and Transmissibility plots from the UI program, and the photograph of the Apreo 2C standing on the DVIA-ML1000 are published.

Kunshan DeKaiYiTe ZEISS Sigma 360 SEM DVIA-ML1000 Installation Report
Kunshan DeKaiYiTe (Kunshan, China) ZEISS Sigma 360 SEM DVIA-ML1000 installation report — following installation the system was tuned and vibration was measured with the equipment in the IDLE state. On all three axes the floor fails the vibration specification while the DVIA-ML1000 active isolation platform passes. Per-axis Auto Spectrum plots and the client tuning request form are published.

Ningbo University of Technology Hitachi High-Tech FE-SEM SU8600 DVIA-ML1000 Installation Report
DVIA-ML1000 installation report (serial 250718R2) for a Hitachi High-Tech FE-SEM (SU8600) at Ningbo University of Technology, Ningbo in China. Tuning was carried out on 2026.06.05, and vibration measurements were taken from the floor and on the DVIA-ML1000 across vertical, left-to-right and front-to-back axes.

ZEISS Sigma 300 VP DVIA-MB1000 (220121R3) Shanghai Installation Report
DVIA-MB1000 worksheet-style installation record (serial 220121R3) for ZEISS Sigma 300 VP at the ZEISS Innovation Center for Research and Development, Shanghai.

SNU Precision DUAL BEAM DVIA-MB1000 (220216R3) Installation Report
DVIA-MB1000 installation report (serial 220216R3) for DUAL BEAM equipment at SNU Precision headquarters C/R, Asan.

Shanghai Institute of Technology and Technology Three-axis Vibration Exciter DVIA-MB1000 (220330R5-3) Installation Report
DVIA-MB1000 (serial 220330R5-3) installation report for a Three-axis Vibration Exciter at Shanghai, China, distributed with Youngha Lee (DAEIL SYSTEMS) as engineer. Tuning July 7, 2023; report July 10, 2023. Includes summary transmissibility table at 2/5/10 Hz and program plots for Z, X, and Y transmissibility plus two equipment photographs.