Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Kunshan DeKaiYiTe ZEISS Sigma 360 SEM DVIA-ML1000 Installation Report
Kunshan DeKaiYiTe (Kunshan, China) ZEISS Sigma 360 SEM DVIA-ML1000 installation report — following installation the system was tuned and vibration was measured with the equipment in the IDLE state. On all three axes the floor fails the vibration specification while the DVIA-ML1000 active isolation platform passes. Per-axis Auto Spectrum plots and the client tuning request form are published.

ZEISS Sigma 300 VP DVIA-MB1000 (220121R3) Shanghai Installation Report
DVIA-MB1000 worksheet-style installation record (serial 220121R3) for ZEISS Sigma 300 VP at the ZEISS Innovation Center for Research and Development, Shanghai.

SNU Precision DUAL BEAM DVIA-MB1000 (220216R3) Installation Report
DVIA-MB1000 installation report (serial 220216R3) for DUAL BEAM equipment at SNU Precision headquarters C/R, Asan.

Shanghai Institute of Technology and Technology Three-axis Vibration Exciter DVIA-MB1000 (220330R5-3) Installation Report
DVIA-MB1000 (serial 220330R5-3) installation report for a Three-axis Vibration Exciter at Shanghai, China, distributed with Youngha Lee (DAEIL SYSTEMS) as engineer. Tuning July 7, 2023; report July 10, 2023. Includes summary transmissibility table at 2/5/10 Hz and program plots for Z, X, and Y transmissibility plus two equipment photographs.

DVIA-MB1000 (220330R5-3) Shanghai Institute Installation Report
DVIA-MB1000 (serial 220330R5-3) installation report prepared for Shanghai Institute of Technology and Technology, Shanghai — Z/X/Y transmissibility plots and equipment photos.

Shanghai Institute of Technology DVIA-MB1000 (220330R5-4) Installation Report
DVIA-MB1000 installation report (serial 220330R5-4) prepared for Shanghai Institute of Technology and Technology, Shanghai, China, with Z-axis, X-axis, and Y-axis transmissibility summary and equipment photos.