Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
Equipment Type
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All Case Studies
Tier-1 Semiconductor Fabrication Facility Hwaseong ZEISS AIMS32-193i DVIA-P4000 Installation Report
Tier-1 Semiconductor Fabrication Facility Hwaseong ZEISS AIMS32-193i DVIA-P4000 Installation Report
DVIA-ULF1000 YIMO Huasheng Lianying YF-1801 Installation Report (250813R2, Dec 2025)
DVIA-ULF1000 (S/N 250813R2) installation and 6th tuning at Huasheng Lianying Vibration Damping Platform, Wuxi, China, for YIDONG FE-SEM YF-1801. After relocating units under the level feet and re-tuning, vertical / left-to-right / front-to-back VC, autospectrum, and transmissibility plots from the UI program are published with equipment photo. Decorative header image omitted; Reference uses the standard VC criteria table (no EMF upload).
YIMO Hitachi FE-SEM SU8600 DVIA-ML1000 (250822R5) Installation Report
DVIA-ML1000 installation report — Hitachi FE-SEM model SU8600 (serial 250822R5). Overview states the platform is appropriately installed and functioning as intended. Vibration specification N/A; End user and location N/A. Measurement summary compares floor vs on DVIA-ML1000 with SU8600 turned on/IDLE. UI-program VC curves, Autospectrum, and Transmissibility (vertical, left-to-right, front-to-back) and equipment photo.
Wuxi YIDONG YF-1801 FE-SEM DVIA-ML1000 Installation Report (2025-12-09)
YIMO partner site — YIDONG YF-1801; DVIA-ML1000 250912R5 (1st). Transmissibility-focused set.
DVIA-ULF1000 Huasheng Lianying Vibration Damping Platform Installation Report — 5th tuning (Dec 2025)
December 2025 tuning report for YIDONG FE-SEM (YF-1801): image instability mitigation, pump-related resonance findings, VC / autospectrum / transmissibility plots on DVIA-ULF1000 (S/N 250813R2), Wuxi.
ZEISS FE-SEM Sigma 360 DVIA-ML1000 (241108R2-1) Installation Report
DVIA-ML1000 installation report (serial 241108R2-1).